Improvement of the Young’s modulus of SiC film by low‐pressure chemical vapor deposition with B2H6 gas
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2002 ◽
Vol 12
(4)
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pp. 69-74
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2017 ◽
Vol 19
(8)
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pp. 1700193
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1999 ◽
Vol 146
(8)
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pp. 2901-2905
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