The Effect of Thermophoresis on Particle Deposition in a Tungsten Low Pressure Chemical Vapor Deposition Reactor
1999 ◽
Vol 146
(8)
◽
pp. 2901-2905
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1999 ◽
Vol 42
(22)
◽
pp. 4131-4142
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1989 ◽
Vol 28
(8)
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pp. 1162-1170
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1994 ◽
Vol 33
(Part 1, No. 12B)
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pp. 7071-7075
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2008 ◽
Vol 254
(10)
◽
pp. 2927-2933
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2002 ◽
Vol 12
(4)
◽
pp. 69-74
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