Atomic beam deposition of lanthanum- and yttrium-based oxide thin films for gate dielectrics

2000 ◽  
Vol 77 (17) ◽  
pp. 2710-2712 ◽  
Author(s):  
S. Guha ◽  
E. Cartier ◽  
M. A. Gribelyuk ◽  
N. A. Bojarczuk ◽  
M. C. Copel
Keyword(s):  
Thin Films ◽  
Atomic Beam ◽  
Gate Dielectrics ◽  
Oxide Thin Films ◽  
Atomic Beam Deposition ◽  
Beam Deposition

High-quality aluminum oxide gate dielectrics by ultra-high-vacuum reactive atomic-beam deposition

2001 ◽  
Vol 90 (1) ◽  
pp. 512-514 ◽  
Author(s):  
S. Guha ◽  
E. Cartier ◽  
N. A. Bojarczuk ◽  
J. Bruley ◽  
L. Gignac ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Atomic Beam ◽  
Gate Dielectrics ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Quality ◽  
Atomic Beam Deposition ◽  
Beam Deposition

Formation and Investigation of Doped Cerium Oxide Thin Films Formed Using E-Beam Deposition Technique

2018 ◽  
pp. 28-34
Author(s):  
Nursultan Kainbayev ◽  
Mantas Sriubas ◽  
Zivile Rutkuniene ◽  
Kristina Bockute ◽  
Saltanat Bolegenova ◽  
...  
Keyword(s):  
Thin Films ◽  
Cerium Oxide ◽  
Deposition Technique ◽  
Oxide Thin Films ◽  
Beam Deposition

Nanocomposite oxide thin films grown by pulsed energy beam deposition

2011 ◽  
Vol 257 (12) ◽  
pp. 5337-5340 ◽  
Author(s):  
M. Nistor ◽  
A. Petitmangin ◽  
C. Hebert ◽  
W. Seiler
Keyword(s):  
Thin Films ◽  
Oxide Thin Films ◽  
Energy Beam ◽  
Beam Deposition

Rare-earth oxide thin films for gate dielectrics in microelectronics

2006 ◽  
Vol 418 (1-2) ◽  
pp. 27-34 ◽  
Author(s):  
Markku Leskelä ◽  
Kaupo Kukli ◽  
Mikko Ritala
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Gate Dielectrics ◽  
Rare Earth Oxide ◽  
Oxide Thin Films

Comparison of Pd/(Bulk SiC) Catalysts Prepared by Atomic Beam Deposition and Plasma Sputtering Deposition: Characterization and Catalytic Properties

2000 ◽  
Vol 190 (1) ◽  
pp. 49-59 ◽  
Author(s):  
A. Berthet ◽  
A.L. Thomann ◽  
F.J. Cadete Santos Aires ◽  
M. Brun ◽  
C. Deranlot ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Catalytic Properties ◽  
Sputtering Deposition ◽  
Plasma Sputtering ◽  
Atomic Beam Deposition ◽  
Beam Deposition

The properties of samarium doped ceria oxide thin films grown by e-beam deposition technique

Vacuum ◽  
2009 ◽  
Vol 83 ◽  
pp. S114-S117 ◽  
Author(s):  
Giedrius Laukaitis ◽  
Mindaugas Jauneika ◽  
Julius Dudonis ◽  
Oresta Katkauske ◽  
Darius Milcius
Keyword(s):  
Thin Films ◽  
Doped Ceria ◽  
Deposition Technique ◽  
Oxide Thin Films ◽  
Ceria Oxide ◽  
Beam Deposition
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