Spatial distribution of the absolute densities of CFx radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence

Infrared Laser ◽

Laser Absorption ◽

Fluorocarbon Plasmas ◽

The Absolute ◽

Single Path

Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.l1469 ◽

1999 ◽

Vol 38 (Part 2, No. 12A) ◽

pp. L1469-L1471 ◽

Cited By ~ 12

Author(s):

Masayuki Nakamura ◽

Hirotaka Nakayama ◽

Masafumi Ito ◽

Masaru Hori ◽

Toshio Goto ◽

...

Keyword(s):

Spatial Distribution ◽

Diode Laser ◽

Plasma Reactor ◽

Fluorescence Technique ◽

Distribution Measurement ◽

Laser Absorption ◽

Diode Laser Absorption ◽

Single Path ◽

Density Plasma

Measurement of Spatial Distribution of SiF4and SiF2Densities in High Density SiF4Plasma Using Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.40.4730 ◽

2001 ◽

Vol 40 (Part 1, No. 7) ◽

pp. 4730-4735 ◽

Cited By ~ 4

Author(s):

Masayuki Nakamura ◽

Masaru Hori ◽

Toshio Goto ◽

Masafumi Ito ◽

Nobuo Ishii

Keyword(s):

Spatial Distribution ◽

Diode Laser ◽

Absorption Spectroscopy ◽

High Density ◽

Fluorescence Technique ◽

Laser Absorption ◽

Diode Laser Absorption ◽

Single Path

Laser‐induced fluorescence spectroscopy for the determination of the absolute density and spatial distribution of Si atoms in a SiH4‐He‐Ar glow discharge

Journal of Applied Physics ◽

10.1063/1.342476 ◽

1988 ◽

Vol 64 (3) ◽

pp. 1050-1054 ◽

Cited By ~ 31

Author(s):

Y. Takubo ◽

Y. Takasugi ◽

M. Yamamoto

Keyword(s):

Spatial Distribution ◽

Glow Discharge ◽

Fluorescence Spectroscopy ◽

Absolute Density ◽

The Absolute

Technical Digest. CLEO/Pacific Rim '99. Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.99TH8464) ◽

Measurement of spatial distribution of absolute CF/sub x/ radical densities in a plasma reactor using infrared diode laser absorption spectroscopy and laser-induced fluorescence

10.1109/cleopr.1999.811464 ◽

2003 ◽

Author(s):

M. Nakamura ◽

H. Nakayama ◽

M. Ito ◽

M. Hori ◽

A. Kono ◽

...

Keyword(s):

Spatial Distribution ◽

Diode Laser ◽

Absorption Spectroscopy ◽

Plasma Reactor ◽

Laser Absorption ◽

Diode Laser Absorption

Laser-induced fluorescence spectroscopic study of reactive plasma. The absolute density and spatial distribution of Si atoms in silane discharege.

The Review of Laser Engineering ◽

10.2184/lsj.17.8_578 ◽

1989 ◽

Vol 17 (8) ◽

pp. 578-585

Author(s):

Yoshitaka TAKUBO ◽

Manabu YAMAMOTO

Keyword(s):

Spatial Distribution ◽

Spectroscopic Study ◽

Reactive Plasma ◽

Absolute Density ◽

The Absolute

A methane telemetry sensor based on near-infrared laser absorption spectroscopy

Infrared Physics & Technology ◽

10.1016/j.infrared.2021.103670 ◽

2021 ◽

Vol 114 ◽

pp. 103670

Author(s):

Haoqing Yang ◽

Xiongzhu Bu ◽

Yihan Cao ◽

Yang Song

Keyword(s):

Absorption Spectroscopy ◽

Near Infrared ◽

Infrared Laser ◽

Laser Absorption

Partial pressure measurement by means of infrared laser absorption spectroscopy

Vacuum ◽

10.1016/s0042-207x(98)00132-8 ◽

1998 ◽

Vol 51 (1) ◽

pp. 47-51 ◽

Cited By ~ 16

Author(s):

E Lanzinger ◽

K Jousten ◽

M Kühne

Keyword(s):

Partial Pressure ◽

Absorption Spectroscopy ◽

Pressure Measurement ◽

Infrared Laser ◽

Laser Absorption

Gas velocimetry based on infrared laser-induced fluorescence

Physics of Fluids ◽

10.1063/5.0074367 ◽

2021 ◽

Vol 33 (12) ◽

pp. 125126

Author(s):

Zihao Song ◽

Weitian Wang ◽

Ning Zhu ◽

Xing Chao

Keyword(s):

Infrared Laser

Near infrared laser induced fluorescence spectroscopy of RuC

Journal of Molecular Spectroscopy ◽

10.1016/j.jms.2014.01.007 ◽

2014 ◽

Vol 297 ◽

pp. 25-31 ◽

Cited By ~ 3

Author(s):

Mei Yang ◽

Tongmei Ma ◽

B.W. Li ◽

Man-Chor Chan ◽

A.S.-C. Cheung

Keyword(s):

Fluorescence Spectroscopy ◽

Near Infrared ◽

Infrared Laser

Single-ended mid-infrared laser-absorption sensor for time-resolved measurements of water concentration and temperature within the annulus of a rotating detonation engine

Proceedings of the Combustion Institute ◽

10.1016/j.proci.2018.05.021 ◽

2019 ◽

Vol 37 (2) ◽

pp. 1435-1443 ◽

Cited By ~ 19

Author(s):

Wen Yu Peng ◽

Séan J. Cassady ◽

Christopher L. Strand ◽

Christopher S. Goldenstein ◽

R. Mitchell Spearrin ◽

...

Keyword(s):

Water Concentration ◽

Infrared Laser ◽

Time Resolved ◽

Mid Infrared ◽

Laser Absorption ◽

Rotating Detonation Engine ◽

Detonation Engine ◽

Rotating Detonation ◽

Time Resolved Measurements