Electrical and optical properties of thin Ta and W oxide films produced by reactive direct current magnetron sputtering

1987 ◽  
Vol 5 (4) ◽  
pp. 1775-1777 ◽  
Author(s):  
B. P. Hichwa ◽  
G. Caskey ◽  
D. F. Betz ◽  
J. D. Harlow
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Oxide Films ◽  
Electrical And Optical Properties ◽  
Direct Current Magnetron Sputtering

Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

2002 ◽  
Vol 92 (7) ◽  
pp. 3599-3607 ◽  
Author(s):  
S. Venkataraj ◽  
Oliver Kappertz ◽  
Hansjörg Weis ◽  
Robert Drese ◽  
R. Jayavel ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Structural And Optical Properties ◽  
Direct Current Magnetron Sputtering

Optical properties of aluminum nitride thin films grown by direct-current magnetron sputtering close to epitaxy

2013 ◽  
Vol 534 ◽  
pp. 442-445 ◽  
Author(s):  
A. Stolz ◽  
A. Soltani ◽  
B. Abdallah ◽  
J. Charrier ◽  
D. Deresmes ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Aluminum Nitride ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Direct Current Magnetron Sputtering

Microstructure and Optical Properties of Ag x O Prepared by Direct-Current Magnetron-Sputtering Method

2008 ◽  
Vol 25 (4) ◽  
pp. 1449-1452 ◽  
Author(s):  
Gao Xiao-Yong ◽  
Liu Xu-Wei ◽  
Wang Song-You ◽  
Liu Yu-Fen ◽  
Lin Qing-Geng ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Direct Current ◽  
Direct Current Magnetron Sputtering
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