Dopant deactivation in heavily Sb doped Si (001): A high-resolution x-ray diffraction and transmission electron microscopy study
2015 ◽
Vol 119
(19)
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pp. 10653-10661
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2001 ◽
Vol 19
(5)
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pp. 2207-2216
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1972 ◽
2004 ◽
Vol 34
(3)
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pp. 345-348
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1977 ◽
Vol 33
(2)
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pp. 276-279
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2002 ◽
Vol 82
(4)
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pp. 735-749
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2006 ◽
Vol 203
(9)
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pp. 2229-2235
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