Dopant deactivation in heavily Sb doped Si (001): A high-resolution x-ray diffraction and transmission electron microscopy study

2002 ◽  
Vol 92 (9) ◽  
pp. 5503-5507 ◽  
Author(s):  
Yayoi Takamura ◽  
Arturas Vailionis ◽  
Ann F. Marshall ◽  
Peter B. Griffin ◽  
James D. Plummer
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