Reactive magnetron sputtering of molybdenum sulfide thin films:In situsynchrotron x-ray diffraction and transmission electron microscopy study

2004 ◽  
Vol 95 (12) ◽  
pp. 7665-7673 ◽  
Author(s):  
V. Weiss ◽  
W. Bohne ◽  
J. Röhrich ◽  
E. Strub ◽  
U. Bloeck ◽  
...  
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