scholarly journals Detection of misfit dislocations at interface of strained Si/Si0.8Ge0.2 by electron-beam-induced current technique

2004 ◽  
Vol 84 (17) ◽  
pp. 3316-3318 ◽  
Author(s):  
X. L. Yuan ◽  
T. Sekiguchi ◽  
S. G. Ri ◽  
S. Ito
Keyword(s):  
Electron Beam ◽  
Misfit Dislocations ◽  
Induced Current ◽  
Strained Si ◽  
Current Technique ◽  
Electron Beam Induced Current

Electron-Beam-Induced-Current (EBIC) Imaging of Defects in Si1−xGeX Multilayer Structures

1989 ◽  
Vol 148 ◽  
Author(s):  
J.C. Sturm ◽  
X. Xiao ◽  
P.M. Garone ◽  
P.V. Schwartz
Keyword(s):  
Electron Beam ◽  
Misfit Dislocations ◽  
Induced Current ◽  
High Quality ◽  
Strained Si ◽  
Density Of Dislocations ◽  
Interface Defects ◽  
Line Defects ◽  
Electron Beam Induced Current ◽  
Reaction Processing

ABSTRACTThe electron-beam-induced-current (EBIC) technique has been used to image dislocations and other defects at strained Si: Sil−xGex epitaxial interfaces and in overlying epitaxial layers grown by Limited Reaction Processing. Depending upon the bias conditions and test structure, one can distinguish between interface defects and those in overlying films. We have found that for a low density of misfit dislocations, a high quality (defect-free) overlying epitaxial layer can be grown, but for a high density of dislocations certain line defects propagate upwards in the overlying layers.

Electron beam induced current technique using a scanning Auger microprobe

1984 ◽  
Vol 55 (7) ◽  
pp. 1129-1131 ◽  
Author(s):  
T. V. Rao ◽  
V. Dutta ◽  
O. S. Sastry ◽  
K. L. Chopra
Keyword(s):  
Electron Beam ◽  
Induced Current ◽  
Current Technique ◽  
Scanning Auger Microprobe ◽  
Electron Beam Induced Current

Electron-Beam-Induced Current Observation of Misfit Dislocations at Si1-XGeX/Si Interfaces

1987 ◽  
Vol 26 (Part 2, No. 12) ◽  
pp. L1944-L1946 ◽  
Author(s):  
Yoshitaka Kohama ◽  
Yoshio Watanabe ◽  
Yukio Fukuda
Keyword(s):  
Electron Beam ◽  
Misfit Dislocations ◽  
Induced Current ◽  
Current Observation ◽  
Electron Beam Induced Current
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