scholarly journals Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process

2005 ◽  
Vol 12 (4) ◽  
pp. 043503 ◽  
Author(s):  
Albert Meige ◽  
Mark Jarnyk ◽  
Dixon T. K. Kwok ◽  
Rod W. Boswell
Keyword(s):  
Shock Wave ◽  
Ion Implantation ◽  
Rise Time ◽  
Rapid Rise ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Implantation Process ◽  
Plasma Immersion Ion Implantation

Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

2008 ◽  
Vol 103 (5) ◽  
pp. 053308 ◽  
Author(s):  
Dixon T. K. Kwok ◽  
Shuilin Wu ◽  
Xiangmei Liu ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Ion Implantation ◽  
Nickel Titanium ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Plasma Immersion Ion Implantation

scholarly journals Adaptation of the de Hoffmann–Teller frame for quasi-perpendicular collisionless shocks

2015 ◽  
Vol 33 (3) ◽  
pp. 345-350 ◽  
Author(s):  
H. Comişel ◽  
Y. Narita ◽  
U. Motschmann
Keyword(s):  
Shock Wave ◽  
Electric Field ◽  
Shock Layer ◽  
Local Magnetic Field ◽  
Sliding Velocity ◽  
Collisionless Shock ◽  
Collisionless Shocks ◽  
Particle In Cell ◽  
Cell Simulation ◽  
High Mach

Abstract. The concept of the de Hoffmann–Teller frame is revisited for a high Mach-number quasi-perpendicular collisionless shock wave. Particle-in-cell simulation shows that the local magnetic field oscillations in the shock layer introduce a residual motional electric field in the de Hoffmann–Teller frame, which is misleading in that one may interpret that electrons were not accelerated but decelerated in the shock layer. We propose the concept of the adaptive de Hoffmann–Teller (AHT) frame in which the residual convective field is canceled by modulating the sliding velocity of the de Hoffmann–Teller frame. The electrostatic potential evaluated by Liouville mapping supports the potential profile obtained by electric field in this adaptive frame, offering a wide variety of applications in shock wave studies.

Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

2007 ◽  
Vol 201 (9-11) ◽  
pp. 5458-5462 ◽  
Author(s):  
Y.X. Huang ◽  
X.B. Tian ◽  
S.Q. Yang ◽  
Ricky K.Y. Fu ◽  
Paul K. Chu
Keyword(s):  
Numerical Simulation ◽  
Ion Implantation ◽  
Particle In Cell ◽  
Plasma Immersion Ion Implantation ◽  
Uniform Plasma

Optimization of a plasma immersion ion implantation process for shallow junctions in silicon

2014 ◽  
Vol 32 (6) ◽  
pp. 061302 ◽  
Author(s):  
Ashok Ray ◽  
Rajashree Nori ◽  
Piyush Bhatt ◽  
Saurabh Lodha ◽  
Richard Pinto ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Shallow Junctions ◽  
Implantation Process ◽  
Plasma Immersion Ion Implantation
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