Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator

2005 ◽  
Vol 98 (5) ◽  
pp. 053502 ◽  
Author(s):  
Zengfeng Di ◽  
Anping Huang ◽  
Ricky K. Y. Fu ◽  
Paul K. Chu ◽  
Lin Shao ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Silicon On Insulator ◽  
Diamondlike Carbon ◽  
Buried Layer ◽  
Plasma Immersion Ion Implantation ◽  
Thermal Stability Of

Effect of plasma immersion ion implantation on the thermal stability of diffusion barrier layers

2004 ◽  
Vol 186 (1-2) ◽  
pp. 77-81 ◽  
Author(s):  
Mukesh Kumar ◽  
Rajkumar ◽  
P.M Raole ◽  
S.K Gupta ◽  
Dinesh Kumar ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Diffusion Barrier ◽  
Barrier Layers ◽  
Plasma Immersion Ion Implantation ◽  
Thermal Stability Of

Mossbauer Study of the Role of Aluminum and Chromium in Nitrogen Implanted Iron

1991 ◽  
Vol 235 ◽  
Author(s):  
M. Kopcewicz ◽  
J. Jagielski ◽  
A. Turos ◽  
D. L. Williamson
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Metallic Iron ◽  
Conversion Electron ◽  
Alloying Elements ◽  
Mössbauer Study ◽  
Conversion Electron Mössbauer Spectroscopy ◽  
Conversion Electron Mossbauer Spectroscopy ◽  
Thermal Stability Of

ABSTRACTThe role of alloying elements such as Cr and Al in the formation and stability of the nitride phases formed due to N ion implantation into metallic iron was studied by conversion electron Mössbauer spectroscopy (CEMS). The thermal stability of nitride phases upon 1 h annealing was greatly increased as a result of co-implanting either Cr or Al with N as compared to pure α-Fe implanted only with N.

Effects of nitrogen ion implantation on the thermal stability of tungsten thin films

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
Thermal Stability Of

Thermal stability of diamondlike carbon films

1996 ◽  
Vol 80 (5) ◽  
pp. 3068-3075 ◽  
Author(s):  
Z. L. Akkerman ◽  
H. Efstathiadis ◽  
F. W. Smith
Keyword(s):  
Thermal Stability ◽  
Carbon Films ◽  
Diamondlike Carbon ◽  
Thermal Stability Of

scholarly journals Thermal Stability of BNCT Neutron Production Target Synthesized by In-Situ Lithium Deposition and Ion Implantation

2013 ◽  
Vol 54 (9) ◽  
pp. 1760-1764 ◽  
Author(s):  
Shintaro Ishiyama ◽  
Yuji Baba ◽  
Ryo Fujii ◽  
Masaru Nakamura ◽  
Yoshio Imahori
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Neutron Production ◽  
Lithium Deposition ◽  
Production Target ◽  
Thermal Stability Of

Improvement of thermal stability of nickel silicide using N>inf/inf

2006 ◽  
Author(s):  
K. Kashihara ◽  
T. Yamaguchi ◽  
T. Okudaira ◽  
T. Tsutsumi ◽  
K. Maekawa ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Nickel Silicide ◽  
Film Deposition ◽  
Nickel Film ◽  
Thermal Stability Of

Diffusion mechanism and the thermal stability of fluorine ions in GaN after ion implantation

2009 ◽  
Vol 105 (8) ◽  
pp. 083519 ◽  
Author(s):  
M. J. Wang ◽  
L. Yuan ◽  
K. J. Chen ◽  
F. J. Xu ◽  
B. Shen
Keyword(s):  
Thermal Stability ◽  
Ion Implantation ◽  
Diffusion Mechanism ◽  
Fluorine Ions ◽  
Thermal Stability Of
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