Rapid-thermal-processing-based intrinsic gettering for nitrogen-doped Czochralski silicon
Keyword(s):
2007 ◽
Vol 10
(4-5)
◽
pp. 222-226
◽
2006 ◽
Vol 203
(4)
◽
pp. 670-676
◽
2011 ◽
Vol 178-179
◽
pp. 249-252
◽
2004 ◽
Vol 19
(5)
◽
pp. 630-633
◽
Keyword(s):
2010 ◽
Vol 49
(8)
◽
pp. 080205
◽
Keyword(s):
Keyword(s):
2004 ◽
Vol 16
(21)
◽
pp. 3563-3569
◽
Keyword(s):
2007 ◽
Vol 22
(12)
◽
pp. 1302-1306
◽
Keyword(s):