scholarly journals Interface trap and oxide charge generation under negative bias temperature instability of p-channel metal-oxide-semiconductor field-effect transistors with ultrathin plasma-nitrided SiON gate dielectrics

2005 ◽  
Vol 98 (11) ◽  
pp. 114504 ◽  
Author(s):  
Shiyang Zhu ◽  
Anri Nakajima ◽  
Takuo Ohashi ◽  
Hideharu Miyake
Sign in / Sign up

Export Citation Format

Share Document