α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

2006 ◽  
Vol 13 (3) ◽  
pp. 033502 ◽  
Author(s):  
Se Youn Moon ◽  
J. K. Rhee ◽  
D. B. Kim ◽  
W. Choe
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Capacitively Coupled

Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

2011 ◽  
Vol 519 (20) ◽  
pp. 6990-6993 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Jialiang Zhang ◽  
Dezhen Wang ◽  
Han S. Uhm
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled

Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge

1999 ◽  
Vol 86 (6) ◽  
pp. 2990-3001 ◽  
Author(s):  
Annemie Bogaerts ◽  
Min Yan ◽  
Renaat Gijbels ◽  
Wim Goedheer
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Glow Discharge
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