Influences of electrode configurations in dual capacitively coupled radio frequency glow discharge plasma
Keyword(s):
1991 ◽
Vol 29
(4)
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pp. 555-570
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1985 ◽
Vol 63
(11)
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pp. 2899-2905
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Keyword(s):
2018 ◽
Vol 46
(8)
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pp. 2766-2775
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2008 ◽
Vol 254
(7)
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pp. 1929-1935
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