Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

2006 ◽  
Vol 360 (2) ◽  
pp. 304-308 ◽  
Author(s):  
Shou-Zhe Li ◽  
Jin-Pyo Lim ◽  
Han S. Uhm
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled ◽  
Argon Plasmas

Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

2011 ◽  
Vol 519 (20) ◽  
pp. 6990-6993 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Jialiang Zhang ◽  
Dezhen Wang ◽  
Han S. Uhm
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled

Effects of Capacitively Coupled Radio Frequency Krypton and Argon Plasmas on Gallium Nitride Etching Damage

2009 ◽  
Vol 48 (8) ◽  
pp. 08HF01 ◽  
Author(s):  
Retsuo Kawakami ◽  
Takeshi Inaoka ◽  
Kikuo Tominaga ◽  
Takashi Mukai
Keyword(s):  
Gallium Nitride ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Argon Plasmas

Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen

2006 ◽  
Vol 89 (16) ◽  
pp. 161504 ◽  
Author(s):  
Hua-Bo Wang ◽  
Wen-Ting Sun ◽  
He-Ping Li ◽  
Cheng-Yu Bao ◽  
Xing Gao ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Glow Discharges
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