Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

2006 ◽  
Vol 360 (2) ◽  
pp. 304-308 ◽  
Author(s):  
Shou-Zhe Li ◽  
Jin-Pyo Lim ◽  
Han S. Uhm
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled ◽  
Argon Plasmas

Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

2011 ◽  
Vol 519 (20) ◽  
pp. 6990-6993 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Jialiang Zhang ◽  
Dezhen Wang ◽  
Han S. Uhm
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled

Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

2006 ◽  
Vol 13 (9) ◽  
pp. 093503 ◽  
Author(s):  
Shou-Zhe Li ◽  
Jin-Pyo Lim ◽  
Jung G. Kang ◽  
Han S. Uhm
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Capacitively Coupled ◽  
Argon Plasmas ◽  
Radio Frequency Discharge

Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

2008 ◽  
Vol 47 (8) ◽  
pp. 6863-6866 ◽  
Author(s):  
Retsuo Kawakami ◽  
Takeshi Inaoka ◽  
Kikuo Tominaga ◽  
Akinobu Kuwahara ◽  
Takashi Mukai
Keyword(s):  
Ultraviolet Radiation ◽  
Radio Frequency ◽  
Synergy Effect ◽  
Particle Radiation ◽  
Capacitively Coupled ◽  
Argon Plasmas ◽  
Gan Etching

scholarly journals Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

2008 ◽  
Vol 93 (26) ◽  
pp. 261503 ◽  
Author(s):  
D. W. Liu ◽  
F. Iza ◽  
M. G. Kong
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Electron Heating ◽  
Capacitively Coupled ◽  
Atmospheric Pressure Plasmas

Effects of Capacitively Coupled Radio Frequency Krypton and Argon Plasmas on Gallium Nitride Etching Damage

2009 ◽  
Vol 48 (8) ◽  
pp. 08HF01 ◽  
Author(s):  
Retsuo Kawakami ◽  
Takeshi Inaoka ◽  
Kikuo Tominaga ◽  
Takashi Mukai
Keyword(s):  
Gallium Nitride ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Argon Plasmas

α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

2006 ◽  
Vol 13 (3) ◽  
pp. 033502 ◽  
Author(s):  
Se Youn Moon ◽  
J. K. Rhee ◽  
D. B. Kim ◽  
W. Choe
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Capacitively Coupled

Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen

2006 ◽  
Vol 89 (16) ◽  
pp. 161504 ◽  
Author(s):  
Hua-Bo Wang ◽  
Wen-Ting Sun ◽  
He-Ping Li ◽  
Cheng-Yu Bao ◽  
Xing Gao ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Glow Discharges
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