Atmospheric-pressure, radio frequency, capacitively coupled helium plasmas

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(94)80155-x ◽

1994 ◽

Vol 49 (1) ◽

pp. 47-57 ◽

Author(s):

M.W. Blades

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Capacitively Coupled

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Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

Applied Physics Letters ◽

10.1063/1.3058686 ◽

2008 ◽

Vol 93 (26) ◽

pp. 261503 ◽

Author(s):

D. W. Liu ◽

F. Iza ◽

M. G. Kong

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Electron Heating ◽

Capacitively Coupled ◽

Atmospheric Pressure Plasmas

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Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma—excitation temperatures and analytical figures of merit

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(97)00080-3 ◽

1997 ◽

Vol 52 (13) ◽

pp. 1983-1993 ◽

Author(s):

M.M. Rahman ◽

M.W. Blades

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Parallel Plate ◽

Capacitively Coupled ◽

Figures Of Merit ◽

Plasma Excitation ◽

Capacitively Coupled Plasma ◽

Analytical Figures Of Merit

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/spl alpha//spl gamma/ and normal, abnormal glow discharge modes in radio-frequency capacitively-coupled discharges at atmospheric pressure

The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2006.1706901 ◽

2006 ◽

Author(s):

W. Choe ◽

S.Y. Moon ◽

D.B. Kim ◽

J.K. Rhee

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Atmospheric Pressure ◽

Capacitively Coupled

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α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

Physics of Plasmas ◽

10.1063/1.2177590 ◽

2006 ◽

Vol 13 (3) ◽

pp. 033502 ◽

Author(s):

Se Youn Moon ◽

J. K. Rhee ◽

D. B. Kim ◽

W. Choe

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Atmospheric Pressure ◽

Capacitively Coupled

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Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

Physics Letters A ◽

10.1016/j.physleta.2006.08.036 ◽

2006 ◽

Vol 360 (2) ◽

pp. 304-308 ◽

Author(s):

Shou-Zhe Li ◽

Jin-Pyo Lim ◽

Han S. Uhm

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Discharge Characteristics ◽

Capacitively Coupled ◽

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Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

Thin Solid Films ◽

10.1016/j.tsf.2011.01.222 ◽

2011 ◽

Vol 519 (20) ◽

pp. 6990-6993 ◽

Author(s):

Shou-Zhe Li ◽

Qi Wu ◽

Jialiang Zhang ◽

Dezhen Wang ◽

Han S. Uhm

Keyword(s):

Glow Discharge ◽

Radio Frequency ◽

Atmospheric Pressure ◽

Discharge Characteristics ◽

Capacitively Coupled

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Characterization of argon/air atmospheric pressure capacitively coupled radio frequency dielectric barrier discharge regarding parasitic capacitor at 13.56 MHz

Journal of Theoretical and Applied Physics ◽

10.1186/2251-7235-6-32 ◽

2012 ◽

Vol 6 (1) ◽

pp. 32 ◽

Author(s):

Farshad Sohbatzadeh ◽

Saeed Mirzanejhad ◽

Hoda Mahdavi ◽

Zahra Omidi

Keyword(s):

Radio Frequency ◽

Dielectric Barrier Discharge ◽

Atmospheric Pressure ◽

Barrier Discharge ◽

Dielectric Barrier ◽

Capacitively Coupled

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Electron avalanches and diffused γ-mode in radio-frequency capacitively coupled atmospheric-pressure microplasmas

Applied Physics Letters ◽

10.1063/1.3186073 ◽

2009 ◽

Vol 95 (3) ◽

pp. 031501 ◽

Author(s):

D. W. Liu ◽

F. Iza ◽

M. G. Kong

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Capacitively Coupled ◽

Electron Avalanches

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Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

Physics of Plasmas ◽

10.1063/1.2355428 ◽

2006 ◽

Vol 13 (9) ◽

pp. 093503 ◽

Author(s):

Shou-Zhe Li ◽

Jin-Pyo Lim ◽

Jung G. Kang ◽

Han S. Uhm

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Capacitively Coupled ◽

Argon Plasmas ◽

Radio Frequency Discharge

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Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.6863 ◽

2008 ◽

Vol 47 (8) ◽

pp. 6863-6866 ◽

Author(s):

Retsuo Kawakami ◽

Takeshi Inaoka ◽

Kikuo Tominaga ◽

Akinobu Kuwahara ◽

Takashi Mukai

Keyword(s):

Ultraviolet Radiation ◽

Radio Frequency ◽

Synergy Effect ◽

Particle Radiation ◽

Capacitively Coupled ◽

Argon Plasmas ◽

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