/spl alpha//spl gamma/ and normal, abnormal glow discharge modes in radio-frequency capacitively-coupled discharges at atmospheric pressure

2006 ◽  
Author(s):  
W. Choe ◽  
S.Y. Moon ◽  
D.B. Kim ◽  
J.K. Rhee
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Capacitively Coupled

Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

2011 ◽  
Vol 519 (20) ◽  
pp. 6990-6993 ◽  
Author(s):  
Shou-Zhe Li ◽  
Qi Wu ◽  
Jialiang Zhang ◽  
Dezhen Wang ◽  
Han S. Uhm
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Discharge Characteristics ◽  
Capacitively Coupled

Modeling of ionization of argon in an analytical capacitively coupled radio-frequency glow discharge

1999 ◽  
Vol 86 (6) ◽  
pp. 2990-3001 ◽  
Author(s):  
Annemie Bogaerts ◽  
Min Yan ◽  
Renaat Gijbels ◽  
Wim Goedheer
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Glow Discharge
Sign in / Sign up

Export Citation Format

Share Document