Development of 40MHz inductively coupled plasma source and frequency effects on plasma parameters
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2006 ◽
Vol 61
(5)
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pp. 579-587
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2002 ◽
Vol 20
(5)
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pp. 1566-1573
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2014 ◽
Vol 85
(1)
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pp. 013510
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1983 ◽
Vol 2
(10)
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pp. 225-230
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1996 ◽
Vol 143
(4)
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pp. 1375-1383
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2004 ◽
Vol 19
(1)
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pp. 149
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2012 ◽
Vol 27
(6)
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pp. 989
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