Multi-antenna RF Ion Source at a High RF Power Level

Author(s):  
Y. Oka ◽  
T. Shoji ◽  
O. Kaneko ◽  
Y. Takeiri ◽  
K. Tsumori ◽  
...  
2013 ◽  
Vol 774-776 ◽  
pp. 471-478
Author(s):  
Song Bai Wang ◽  
Guang Jiu Lei ◽  
Ming Li ◽  
Li Ming Yu ◽  
Ying Nan Bu ◽  
...  

In high-power RF ion source, three different regions of the Hβand Hγintensities in the Balmer series of spectral lines for atomic hydrogen plasma were investigated. Three different regions of the Hβand Hγintensities were detected by the increase of input power (0-6 kW) at ICP. In hydrogen plasma spectrum, the Hβand Hγintensities showed three processes: slowly increase, quickly increase and stable saturation. The Stark effect in strong electrical field plays a crucial role in dominating the Balmer Hβand Hγemissions from high-density RF plasma.


2014 ◽  
Vol 65 (8) ◽  
pp. 1273-1276 ◽  
Author(s):  
Doo-Hee Chang ◽  
Min Park ◽  
Seung Ho Jeong ◽  
Tae-Seong Kim ◽  
Kwang Won Lee ◽  
...  

1985 ◽  
Vol 18 (2) ◽  
pp. 169-176
Author(s):  
C Moreau ◽  
C Rioux ◽  
R J Slobodrian
Keyword(s):  

2020 ◽  
Vol 160 ◽  
pp. 111826
Author(s):  
Qi Wang ◽  
Chundong Hu ◽  
Yahong Xie ◽  
Lizhen Liang ◽  
Jianglong Wei ◽  
...  

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