In situ Auger electron spectroscopy of Si and SiO2 surfaces plasma etched in CF4-H2 glow discharges

Journal of Applied Physics ◽

10.1063/1.326660 ◽

1979 ◽

Vol 50 (8) ◽

pp. 5210 ◽

Author(s):

J. W. Coburn

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Glow Discharges

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In situ Auger electron spectroscopy of Si and SiO2 surfaces plasma etched in CF4-H2 glow discharges

Vacuum ◽

10.1016/s0042-207x(80)80595-1 ◽

1980 ◽

Vol 30 (8-9) ◽

pp. 353

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Glow Discharges

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"IN SITU" AUGER ELECTRON SPECTROSCOPY APPLIED TO STUDY THE CHANGE OF SURFACE OF TiNi ALLOY IN NITROGEN ATMOSPHERE AT LOW PRESSURE AND AT ROOM TEMPERATURE

Applied Crystallography ◽

10.1142/9789812811325_0056 ◽

2001 ◽

Author(s):

E. Rówiński ◽

E. Łągiewka

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Room Temperature ◽

Low Pressure ◽

Nitrogen Atmosphere ◽

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ChemInform Abstract: An Investigation of Thin Oxide Films Thermally Grown in situ on Fe-24 Cr and Fe- 24 Cr-ll Mo by Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy.

Chemischer Informationsdienst ◽

10.1002/chin.198642031 ◽

1986 ◽

Vol 17 (42) ◽

Author(s):

H. J. MATHIEU ◽

D. LANDOLT

Keyword(s):

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

X Ray ◽

Thin Oxide Films ◽

Thermally Grown

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Alloy Sputtering Studies with in situ Auger Electron Spectroscopy

Journal of Applied Physics ◽

10.1063/1.1660561 ◽

1971 ◽

Vol 42 (6) ◽

pp. 2449-2452 ◽

Author(s):

M. L. Tarng ◽

G. K. Wehner

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

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An in situ slow extension rate fracture stage for Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572172 ◽

1983 ◽

Vol 1 (3) ◽

pp. 1477-1479 ◽

Author(s):

G. S. Was ◽

H. H. Tischner ◽

J. R. Martin

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

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LiMn2O4 Surface Chemistry Evolution during Cycling Revealed by in Situ Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

ACS Applied Materials & Interfaces ◽

10.1021/acsami.7b10442 ◽

2017 ◽

Vol 9 (39) ◽

pp. 33968-33978 ◽

Author(s):

Ching-Yen Tang ◽

Kevin Leung ◽

Richard T. Haasch ◽

Shen J. Dillon

Keyword(s):

Surface Chemistry ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

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In situ auger electron spectroscopy applied to the study of chemisorption and diffusion during reactive implantation of titanium into iron

Applied Surface Science ◽

10.1016/0169-4332(86)90081-4 ◽

1986 ◽

Vol 25 (4) ◽

pp. 364-379 ◽

Author(s):

D.A. Baldwin ◽

B.D. Sartwell ◽

I.L. Singer

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

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Investigations of partial reactions during magnetron sputtering of TiN coatings by in situ Auger electron spectroscopy analysis and plasma diagnostics

Metallurgical Coatings and Thin Films 1991 ◽

10.1016/b978-0-444-89455-7.50029-0 ◽

1991 ◽

pp. 127-131

Author(s):

N. Eguchi ◽

V. Grajewski ◽

H.H. Uchida ◽

E. Fromm

Keyword(s):

Magnetron Sputtering ◽

Auger Electron Spectroscopy ◽

Plasma Diagnostics ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Analysis ◽

Auger Electron Spectroscopy Analysis ◽

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An in situ Auger electron spectroscopy study of chromium thin film coverage of copper surfaces: Effects of surface morphology, temperature and environment

Thin Solid Films ◽

10.1016/0040-6090(91)90030-2 ◽

1991 ◽

Vol 200 (1) ◽

pp. 67-76 ◽

Author(s):

H. Lefakis ◽

P.S. Ho

Keyword(s):

Thin Film ◽

Surface Morphology ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Copper Surfaces

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Determination of N-/Ga-rich growth conditions, using in-situ auger electron spectroscopy

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2015.02.035 ◽

2015 ◽

Vol 425 ◽

pp. 2-4 ◽

Author(s):

S.P. Svensson ◽

W.L. Sarney ◽

K.M. Yu ◽

M. Ting ◽

W.L. Calley ◽

...

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Growth Conditions

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