An in situ Auger electron spectroscopy study of chromium thin film coverage of copper surfaces: Effects of surface morphology, temperature and environment

Thin Solid Films ◽

10.1016/0040-6090(91)90030-2 ◽

1991 ◽

Vol 200 (1) ◽

pp. 67-76 ◽

Author(s):

H. Lefakis ◽

P.S. Ho

Keyword(s):

Thin Film ◽

Surface Morphology ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Copper Surfaces

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An Auger electron spectroscopy/electron energy‐loss spectroscopy study on the oxidation of WSi2 thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574620 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1456-1458 ◽

Author(s):

Jian‐Wei He ◽

Preben J. Mo/ller ◽

Jiann‐Ruey Chen

Keyword(s):

Thin Film ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Electron Energy Loss

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7404. An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protected overlayers at microelectronic solid/ liquid interfaces

Vacuum ◽

10.1016/0042-207x(91)91211-6 ◽

1991 ◽

Vol 42 (8-9) ◽

pp. 594

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Mechanical Degradation ◽

Liquid Interfaces ◽

Spectroscopy Study ◽

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Auger electron spectroscopy study of AlxIn1-xN thin film homogeneity

Thin Solid Films ◽

10.1016/0040-6090(85)90349-9 ◽

1985 ◽

Vol 128 (1-2) ◽

pp. L41-L43 ◽

Author(s):

K. Starosta ◽

J. Marsik

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study

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An Auger electron spectroscopy study of the oxidation and mechanical degradation of Ta thin film protective overlayers at microelectronic solid/liquid interfaces

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576624 ◽

1990 ◽

Vol 8 (3) ◽

pp. 3026-3032 ◽

Author(s):

S. Matts Goho

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Mechanical Degradation ◽

Liquid Interfaces ◽

Spectroscopy Study ◽

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In Situ Auger Electron Spectroscopy Study of Atomic Layer Deposition: Growth Initiation and Interface Formation Reactions during Ruthenium ALD on Si−H, SiO2, and HfO2Surfaces

Langmuir ◽

10.1021/la061898u ◽

2007 ◽

Vol 23 (11) ◽

pp. 6106-6112 ◽

Author(s):

Kie Jin Park ◽

David B. Terry ◽

S. Michael Stewart ◽

Gregory N. Parsons

Keyword(s):

Atomic Layer Deposition ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Atomic Layer ◽

Spectroscopy Study ◽

Interface Formation ◽

Layer Deposition ◽

Growth Initiation

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Auger electron spectroscopy study on interfacial reactions in multilayer thin film systems

Journal of Applied Physics ◽

10.1063/1.331226 ◽

1982 ◽

Vol 53 (6) ◽

pp. 4422-4427 ◽

Author(s):

Kiril A. Pandelišev ◽

Edward Y. Wang

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Multilayer Thin Film ◽

Spectroscopy Study

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Auger electron spectroscopy study on interfacial reactions in multilayer thin film systems

Vacuum ◽

10.1016/0042-207x(83)90239-7 ◽

1983 ◽

Vol 33 (6) ◽

pp. 357

Keyword(s):

Thin Film ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Interfacial Reactions ◽

Multilayer Thin Film ◽

Spectroscopy Study

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In Situ proton-induced X-ray emission and auger electron spectroscopy study of titanium and niobium implantation of iron films

Materials Science and Engineering ◽

10.1016/0025-5416(85)90356-8 ◽

1985 ◽

Vol 69 (2) ◽

pp. 539-547 ◽

Author(s):

B.D. Sartwell ◽

D.A. Baldwin

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

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"IN SITU" AUGER ELECTRON SPECTROSCOPY APPLIED TO STUDY THE CHANGE OF SURFACE OF TiNi ALLOY IN NITROGEN ATMOSPHERE AT LOW PRESSURE AND AT ROOM TEMPERATURE

Applied Crystallography ◽

10.1142/9789812811325_0056 ◽

2001 ◽

Author(s):

E. Rówiński ◽

E. Łągiewka

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Room Temperature ◽

Low Pressure ◽

Nitrogen Atmosphere ◽

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Auger electron spectroscopy study of Ni3Si

Scripta Metallurgica ◽

10.1016/0036-9748(89)90492-4 ◽

1989 ◽

Vol 23 (11) ◽

pp. 1969-1973 ◽

Author(s):

I. Baker ◽

R.A. Padgett ◽

E.M. Schulson

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study

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