Simulation of reactive ion etching pattern transfer

1989 ◽  
Vol 66 (10) ◽  
pp. 4664-4675 ◽  
Author(s):  
Eric S. G. Shaqfeh ◽  
Charles W. Jurgensen
Keyword(s):  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Ion Etching ◽  
Etching Pattern

scholarly journals Influence of block copolymer feature size on reactive ion etching pattern transfer into silicon

2017 ◽  
Vol 28 (40) ◽  
pp. 404001 ◽  
Author(s):  
M Dialameh ◽  
F Ferrarese Lupi ◽  
D Imbraguglio ◽  
F Zanenga ◽  
A Lamperti ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Feature Size ◽  
Ion Etching ◽  
Etching Pattern

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

2007 ◽  
Vol 84 (5-8) ◽  
pp. 1215-1218 ◽  
Author(s):  
Maria Villarroya ◽  
Nuria Barniol ◽  
Cristina Martin ◽  
Francesc Pérez-Murano ◽  
Jaume Esteve ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Ion Etching ◽  
Etching Pattern

Use of polymethylmethacrylate as an initial pattern transfer layer in fluorine- and chlorine-based reactive-ion etching

1999 ◽  
Vol 17 (1) ◽  
pp. 113 ◽  
Author(s):  
Christopher J. M. Smith ◽  
Saad K. Murad ◽  
Thomas F. Krauss ◽  
Richard M. De La Rue ◽  
Christopher D. W. Wilkinson
Keyword(s):  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Transfer Layer ◽  
Ion Etching ◽  
Initial Pattern

Ion and electron beam deposited masks for pattern transfer by reactive ion etching

2011 ◽  
Vol 88 (8) ◽  
pp. 2710-2713 ◽  
Author(s):  
A. Notargiacomo ◽  
E. Giovine ◽  
L. Di Gaspare
Keyword(s):  
Electron Beam ◽  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Ion Etching

STM writing of artificial nanostructures in ultrathin PMMA and SAM resists and subsequent pattern transfer in a Mo/Si multilayer by reactive ion etching

1998 ◽  
Vol 66 (7) ◽  
pp. S685-S688 ◽  
Author(s):  
J. Hartwich ◽  
L. Dreeskornfeld ◽  
V. Heisig ◽  
S. Rahn ◽  
O. Wehmeyer ◽  
...  
Keyword(s):  
Reactive Ion Etching ◽  
Pattern Transfer ◽  
Ion Etching ◽  
Artificial Nanostructures
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