Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) ◽

10.1109/sensor.2003.1217131 ◽

2004 ◽

Author(s):

M. Hara ◽

J. Kuypers ◽

T. Abe ◽

M. Esashi

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Sacrificial Layer ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Download Full-text

Spurious Suppression without Energy Dissipation in Aluminum–Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.07gc11 ◽

2012 ◽

Vol 51 ◽

pp. 07GC11 ◽

Author(s):

Motoaki Hara ◽

Hiroki Kuwano

Keyword(s):

Thin Film ◽

Energy Dissipation ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Thin Ring ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Spurious Suppression ◽

Electrode Edge ◽

Without Energy Dissipation

Download Full-text

Spurious Suppression without Energy Dissipation in Aluminum–Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.07gc11 ◽

2012 ◽

Vol 51 (7S) ◽

pp. 07GC11 ◽

Author(s):

Motoaki Hara ◽

Hiroki Kuwano

Keyword(s):

Thin Film ◽

Energy Dissipation ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Thin Ring ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Spurious Suppression ◽

Electrode Edge ◽

Without Energy Dissipation

Download Full-text

Mass sensitivity of thin film bulk acoustic resonator sensors based on polarc-axis tilted zinc oxide and aluminum nitride thin film

Journal of Applied Physics ◽

10.1063/1.3483245 ◽

2010 ◽

Vol 108 (10) ◽

pp. 104510 ◽

Author(s):

Lifeng Qin ◽

Qing-Ming Wang

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Acoustic Resonator ◽

Mass Sensitivity ◽

Film Bulk Acoustic Resonator ◽

Download Full-text

A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production

Ultrasonics ◽

10.1016/j.ultras.2012.04.003 ◽

2013 ◽

Vol 53 (1) ◽

pp. 90-96 ◽

Author(s):

Motoaki Hara ◽

Masanori Ueda ◽

Yoshio Satoh

Keyword(s):

Thin Film ◽

Mass Production ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Download Full-text

Simulation study of electrode effect on thin film bulk acoustic resonator for viscosity sensor application

2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) ◽

10.1109/spawda.2017.8340349 ◽

2017 ◽

Author(s):

Hai-qiang Liu ◽

Jing-hui Dai ◽

Jin-hui Zhang ◽

Ling-feng Kong ◽

Li-feng Qin

Keyword(s):

Thin Film ◽

Simulation Study ◽

Acoustic Resonator ◽

Electrode Effect ◽

Sensor Application ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Viscosity Sensor

Download Full-text

Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

COMPEL The International Journal for Computation and Mathematics in Electrical and Electronic Engineering ◽

10.1108/03321640810905774 ◽

2008 ◽

Vol 27 (6) ◽

pp. 1296-1306 ◽

Author(s):

Concettina Buccella ◽

Valerio De Santis ◽

Mauro Feliziani ◽

Piero Tognolatti

Keyword(s):

Thin Film ◽

Finite Element ◽

Finite Element Modelling ◽

Acoustic Resonator ◽

Element Modelling ◽

Film Bulk Acoustic Resonator ◽

Download Full-text

Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor

Biosensors and Bioelectronics ◽

10.1016/j.bios.2012.08.018 ◽

2013 ◽

Vol 41 ◽

pp. 163-167 ◽

Author(s):

Da Chen ◽

Jingjing Wang ◽

Yan Xu ◽

Dehua Li ◽

Luyin Zhang ◽

...

Keyword(s):

Thin Film ◽

Organophosphorus Pesticides ◽

Acoustic Resonator ◽

Sensitive Detection ◽

Mass Loading ◽

Highly Sensitive ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Highly Sensitive Detection

Download Full-text

AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2010.08.109 ◽

2010 ◽

Vol 205 (5) ◽

pp. 1279-1286 ◽

Author(s):

G. Wingqvist

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Sputter Deposited ◽

Biosensor Applications

Download Full-text

Multifunctional ZnO-Based Thin-Film Bulk Acoustic Resonator for Biosensors

Journal of Electronic Materials ◽

10.1007/s11664-009-0813-4 ◽

2009 ◽

Vol 38 (8) ◽

pp. 1605-1611 ◽

Author(s):

Ying Chen ◽

Pavel I. Reyes ◽

Ziqing Duan ◽

Gaurav Saraf ◽

Richard Wittstruck ◽

...

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Download Full-text

Thin-film bulk acoustic resonator RF bandpass filter design technique using genetic algorithm

Electronics Letters ◽

10.1049/el:20030313 ◽

2003 ◽

Vol 39 (5) ◽

pp. 444 ◽

Author(s):

Jeongheum Lee ◽

Hyeongdong Kim

Keyword(s):

Thin Film ◽

Genetic Algorithm ◽

Bandpass Filter ◽

Filter Design ◽

Acoustic Resonator ◽

Design Technique ◽

Film Bulk Acoustic Resonator ◽

Download Full-text