Growth of gallium nitride thin films by electron cyclotron resonance microwave plasma‐assisted molecular beam epitaxy

Journal of Applied Physics ◽

10.1063/1.353870 ◽

1993 ◽

Vol 73 (1) ◽

pp. 448-455 ◽

Author(s):

C. R. Eddy ◽

T. D. Moustakas ◽

J. Scanlon

Keyword(s):

Gallium Nitride ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Resonance Microwave

Download Full-text

Kinetic modeling of microscopic processes during electron cyclotron resonance microwave plasma‐assisted molecular beam epitaxial growth of GaN/GaAs‐based heterostructures

Applied Physics Letters ◽

10.1063/1.115682 ◽

1996 ◽

Vol 68 (11) ◽

pp. 1510-1512 ◽

Author(s):

Z. Z. Bandić ◽

R. J. Hauenstein ◽

M. L. O’Steen ◽

T. C. McGill

Keyword(s):

Epitaxial Growth ◽

Kinetic Modeling ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth ◽

Resonance Microwave

Download Full-text

Passivation of GaAs(110) with Ga2O3 thin films deposited by electron cyclotron resonance plasma reactive molecular beam epitaxy

Journal of Applied Physics ◽

10.1063/1.1497455 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2330-2334 ◽

Author(s):

D. Kim ◽

G. Chen ◽

X. Y. Mei ◽

H. E. Ruda

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

In situ FT-IR reflective absorption spectroscopy for characterization of SiO2 thin films deposited using sputtering-type electron cyclotron resonance microwave plasma

Applied Surface Science ◽

10.1016/s0169-4332(97)00294-8 ◽

1997 ◽

Vol 121-122 ◽

pp. 228-232 ◽

Author(s):

Katsuhiko Furukawa ◽

Yichun Liu ◽

Dawei Gao ◽

Hiroshi Nakashima ◽

Kiichiro Uchino ◽

...

Keyword(s):

Absorption Spectroscopy ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Ft Ir ◽

Resonance Microwave

Download Full-text

Growth of gallium nitride by electron‐cyclotron resonance plasma‐assisted molecular‐beam epitaxy: The role of charged species

Journal of Applied Physics ◽

10.1063/1.357293 ◽

1994 ◽

Vol 76 (8) ◽

pp. 4587-4595 ◽

Author(s):

R. J. Molnar ◽

T. D. Moustakas

Keyword(s):

Gallium Nitride ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Charged Species ◽

Resonance Plasma

Download Full-text

Low-Temperature Sputter-Deposition of Ni-Zn Ferrite Thin Films Using Electron-Cyclotron-Resonance Microwave Plasma.

Journal of the Magnetics Society of Japan ◽

10.3379/jmsjmag.27.363 ◽

2003 ◽

Vol 27 (4) ◽

pp. 363-366 ◽

Author(s):

S. Yamamoto ◽

H. Wada ◽

H. Kurisu ◽

M. Matsuura ◽

Y. Shimosato

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Sputter Deposition ◽

Electron Cyclotron ◽

Ferrite Thin Films ◽

Resonance Microwave

Download Full-text

Mg doping studies of electron cyclotron resonance molecular beam epitaxy of GaN thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581744 ◽

1999 ◽

Vol 17 (4) ◽

pp. 2166-2169 ◽

Author(s):

I. Berishev ◽

E. Kim ◽

A. Fartassi ◽

M. Sayhi ◽

A. Bensaoula

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Download Full-text

Operation of a compact electron cyclotron resonance source for the growth of gallium nitride by molecular beam epitaxy (ECR-MBE)

Journal of Electronic Materials ◽

10.1007/bf02659687 ◽

1995 ◽

Vol 24 (4) ◽

pp. 275-281 ◽

Author(s):

R. J. Molnar ◽

R. Singh ◽

T. D. Moustakas

Keyword(s):

Gallium Nitride ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron

Download Full-text

Growth of ZnO Thin Films on LiNbO3Substrates by Electron Cyclotron Resonance-Assisted Molecular Beam Epitaxy

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.5220 ◽

1998 ◽

Vol 37 (Part 1, No. 9B) ◽

pp. 5220-5223 ◽

Author(s):

Hee-Bog Kang ◽

Kenji Yoshida ◽

Kiyoshi Nakamura

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Download Full-text

Study of the effect of plasma power on ZnO thin films growth using electron cyclotron resonance plasma-assisted molecular-beam epitaxy

Applied Surface Science ◽

10.1016/j.apsusc.2008.09.068 ◽

2008 ◽

Vol 255 (5) ◽

pp. 3375-3380 ◽

Author(s):

Z. Yang ◽

J.-H. Lim ◽

S. Chu ◽

Z. Zuo ◽

J.L. Liu

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Plasma Power ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Preparation of As-Grown BiPbSrCaCuO Thin Films by Electron-Cyclotron-Resonance Microwave Plasma Sputtering

Japanese Journal of Applied Physics ◽

10.1143/jjap.28.l1220 ◽

1989 ◽

Vol 28 (Part 2, No. 7) ◽

pp. L1220-L1222 ◽

Author(s):

Yasuhiro Nishimori ◽

Shoichiro Minomo ◽

Michio Taniguchi ◽

Masato Sugiyo ◽

Yoshito Fukumoto ◽

...

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Plasma Sputtering ◽

Resonance Microwave

Download Full-text