Passivation of GaAs(110) with Ga2O3 thin films deposited by electron cyclotron resonance plasma reactive molecular beam epitaxy

2002 ◽  
Vol 92 (5) ◽  
pp. 2330-2334 ◽  
Author(s):  
D. Kim ◽  
G. Chen ◽  
X. Y. Mei ◽  
H. E. Ruda
Keyword(s):  
Thin Films ◽  
Molecular Beam Epitaxy ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of HgTe-CdTe superlattices grown by photo-assisted molecular beam epitaxy

1995 ◽  
Vol 24 (9) ◽  
pp. 1201-1206 ◽  
Author(s):  
K. A. Harris ◽  
D. W. Endres ◽  
R. W. Yanka ◽  
L. M. Mohnkern ◽  
A. R. Reisinger ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Molecular Beam ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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