Study of diamond thin‐film growth mechanism in a filament‐assisted excimer laser ablation system

1994 ◽  
Vol 76 (12) ◽  
pp. 8113-8116 ◽  
Author(s):  
H. Chen ◽  
N. Maffei ◽  
R. H. Prince
Shinku ◽  
1993 ◽  
Vol 36 (3) ◽  
pp. 219-222
Author(s):  
Satoru KANEKO ◽  
Seishiro OHYA ◽  
Ken KOBAYASHI ◽  
Shiro KARASAWA

2006 ◽  
Vol 18 (32) ◽  
pp. S1771-S1776 ◽  
Author(s):  
James Birrell ◽  
J E Gerbi ◽  
O A Auciello ◽  
J A Carlisle

1997 ◽  
Vol 502 ◽  
Author(s):  
R. W. Collins ◽  
Joungchel Lee ◽  
P. I. Rovira ◽  
Ilsin An

ABSTRACTA multichannel spectroscopic ellipsometer based on the rotating-compensator principle was developed and applied to characterize nanocrystalline diamond thin film growth processes by plasma-enhanced chemical vapor deposition (PECVD). With the newly-designed instrument, a time resolution of 32 ms is possible for spectra (1.5˜4.0 eV) in the Stokes vector of the light beam reflected from the surface of the growing film. Several advantages of the rotating-compensator over the simpler rotating-polarizer multichannel ellipsometer design are demonstrated here for diamond thin film growth. These include the ability to: (i) resolve the sign ambiguity in the p–s wave phase-shift difference Δ, (ii) obtain accurate Δ values for low ellipticity polarization states, and (iii) deduce spectra in the degree of polarization of the light beam reflected from the film/substrate. The degree of polarization has been applied to characterize the time evolution of light scattering during the nucleation of the diamond, as well as the time evolution of thickness non-uniformity over the probed area of the growing film. In this paper, a brief description of calibration and data reduction for the new instrument is also provided.


Nanoscale ◽  
2020 ◽  
Vol 12 (6) ◽  
pp. 3834-3845 ◽  
Author(s):  
Laura Katharina Scarbath-Evers ◽  
René Hammer ◽  
Dorothea Golze ◽  
Martin Brehm ◽  
Daniel Sebastiani ◽  
...  

An unexpected growth mechanism for organic semiconductors on gold where the molecules approach their bulk structure over several interfacial layers.


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