scholarly journals Self‐consistent kinetic modeling of low‐pressure inductively coupled radio‐frequency discharges

1996 ◽  
Vol 80 (7) ◽  
pp. 3699-3704 ◽  
Author(s):  
Yun Yang ◽  
Hanming Wu
Keyword(s):  
Radio Frequency ◽  
Kinetic Modeling ◽  
Low Pressure ◽  
Inductively Coupled ◽  
Self Consistent ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Ion fluxes and energies in inductively coupled radio-frequency discharges containing CHF3

2000 ◽  
Vol 88 (10) ◽  
pp. 5612-5617 ◽  
Author(s):  
Yicheng Wang ◽  
M. Misakian ◽  
A. N. Goyette ◽  
J. K. Olthoff
Keyword(s):  
Radio Frequency ◽  
Ion Fluxes ◽  
Inductively Coupled ◽  
Radio Frequency Discharges

Kinetic modeling of the α to γ transition in radio frequency discharges

1993 ◽  
Vol 5 (2) ◽  
pp. 646-649 ◽  
Author(s):  
G. J. Parker ◽  
W. N. G. Hitchon ◽  
J. E. Lawler
Keyword(s):  
Radio Frequency ◽  
Kinetic Modeling ◽  
Radio Frequency Discharges
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