Lateral confinement by low pressure chemical vapor deposition-based selective epitaxial growth of Si1−xGex/Si nanostructures
1997 ◽
Vol 15
(1)
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pp. 138
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1997 ◽
Vol 15
(6)
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pp. 1902
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Selective epitaxial growth using dichlorosilane and silane by low pressure chemical vapor deposition
2004 ◽
Vol 73-74
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pp. 514-518
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2012 ◽
Vol 717-720
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pp. 105-108
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Keyword(s):
2008 ◽
Vol 254
(19)
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pp. 6086-6089
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Keyword(s):
Keyword(s):
Keyword(s):