Effect of the Ti molar ratio on the electrical characteristics of titanium-indium-zinc-oxide thin-film transistors fabricated by using a solution process

2011 ◽  
Vol 99 (16) ◽  
pp. 161908 ◽  
Author(s):  
Ho Yong Chong ◽  
Kyu Wan Han ◽  
Young Soo No ◽  
Tae Whan Kim
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
Solution Process ◽  
Oxide Thin Film ◽  
Molar Ratio ◽  
Electrical Characteristics ◽  
Zinc Oxide Thin Film ◽  
Indium Zinc Oxide

Hafnium Incorporation in InZnO Thin Film Transistors as a Carrier Suppressor

2020 ◽  
Vol 20 (11) ◽  
pp. 6675-6678
Author(s):  
Donghyeon Lee ◽  
Pyungho Choi ◽  
Areum Park ◽  
Woojin Jeon ◽  
Donghee Choi ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Threshold Voltage ◽  
Thin Film Transistors ◽  
Solution Process ◽  
Oxide Thin Film ◽  
Molar Ratio ◽  
Threshold Voltage Shift ◽  
Indium Zinc Oxide ◽  
Process Channel

In this study, we fabricated Hf-doped indium zinc oxide thin-film transistors (HIZO TFTs) using a solution process. Channel layers of the TFTs were optimized by varying the molar ratio of Hf in the channel layers. The electrical properties of the fabricated devices were compared to gallium indium zinc oxide (GIZO). HIZO TFTs showed 0.12 V threshold voltage, 0.45 V/decade subthreshold swing and 1.24 × 106 on–off current ratio, which were excellent compared to that of GIZO. In particular, when a positive gate bias stress of 10 V was applied for 103 s, the HIZO TFT exhibited a lower threshold voltage shift of 1.11 V than the GIZO TFT (1.88 V). These results originate from the higher oxygen bonding with Hf in IZO compared to Ga atoms. We confirmed that Hf acts as an excellent carrier suppressor whose properties exceed those of Ga.

Direct Photo-Patternable Indium Zinc Oxide Thin Film Transistors Fabricated by Solution Process

2016 ◽  
Vol 8 (4) ◽  
pp. 926-930
Author(s):  
Sang-Hun Choi ◽  
Kyoung-Tae Park ◽  
Bum-Sung Kim ◽  
Taek-Soo Kim ◽  
Seok-Jun Seo
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
Solution Process ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film ◽  
Indium Zinc Oxide
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