Structures, electrical and optical properties of nickel oxide films by radio frequency magnetron sputtering

Vacuum ◽  
2014 ◽  
Vol 103 ◽  
pp. 14-16 ◽  
Author(s):  
Y. Zhao ◽  
H. Wang ◽  
C. Wu ◽  
Z.F. Shi ◽  
F.B. Gao ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nickel Oxide ◽  
Oxide Films ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical And Optical Properties ◽  
Nickel Oxide Films

Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by Radio Frequency Magnetron Sputtering

2020 ◽  
Vol 217 (14) ◽  
pp. 1900955
Author(s):  
Maki Kushimoto ◽  
Tadayoshi Sakai ◽  
Yoshihiro Ueoka ◽  
Shigekazu Tomai ◽  
Satoshi Katsumata ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical And Optical Properties
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