Effect of oxygen to argon ratio on properties of (Ba,Sr)TiO3 thin films prepared by radio-frequency magnetron sputtering

1997 ◽  
Vol 82 (7) ◽  
pp. 3482-3487 ◽  
Author(s):  
M. S. Tsai ◽  
S. C. Sun ◽  
T. Y. Tseng
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Effect Of Oxygen

Effect of oxygen flow rate on properties of Cu4O3 thin films fabricated by radio frequency magnetron sputtering

2020 ◽  
Vol 127 (8) ◽  
pp. 085302 ◽  
Author(s):  
Md Abdul Majed Patwary ◽  
Chun Yuen Ho ◽  
Katsuhiko Saito ◽  
Qixin Guo ◽  
Kin Man Yu ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Flow Rate ◽  
Oxygen Flow Rate ◽  
Radio Frequency Magnetron ◽  
Oxygen Flow ◽  
Radio Frequency Magnetron Sputtering ◽  
Effect Of Oxygen

Nitrogen Doping into Cu2O Thin Films Deposited by Reactive Radio-Frequency Magnetron Sputtering

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2765-2768 ◽  
Author(s):  
Shogo Ishizuka ◽  
Shinya Kato ◽  
Takahiro Maruyama ◽  
Katsuhiro Akimoto
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Nitrogen Doping ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Cu2o Thin Films

scholarly journals Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries

2016 ◽  
Vol 307 ◽  
pp. 684-689 ◽  
Author(s):  
S. Lobe ◽  
C. Dellen ◽  
M. Finsterbusch ◽  
H.-G. Gehrke ◽  
D. Sebold ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid State ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Solid State Batteries

scholarly journals Preparation of LaFeO3 Perovskite Thin Films by Radio Frequency Magnetron Sputtering and Their Electrical Conductivities

2001 ◽  
Vol 69 (3) ◽  
pp. 171-176 ◽  
Author(s):  
Satoshi YAMADA ◽  
Hideo TAI ◽  
Yasumichi MATSUMOTO ◽  
Michio KOINUMA ◽  
Kai KAMADA ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Electrical Conductivities
Sign in / Sign up

Export Citation Format

Share Document