Drive current and hot carrier reliability improvements of high-aspect-ratio n-channel fin-shaped field effect transistor with high-tensile contact etching stop layer
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Keyword(s):
2015 ◽
Vol 15
(5)
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pp. 3956-3961
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Keyword(s):
Keyword(s):
1990 ◽
Vol 29
(Part 2, No. 12)
◽
pp. L2286-L2288
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Keyword(s):
2000 ◽
Vol 39
(Part 2, No. 1A/B)
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pp. L28-L30