Ultrathin silicon oxynitride films grown by Ar/N2O remote plasma processing
2015 ◽
Vol 13
(1)
◽
pp. 147-160
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1998 ◽
Vol 16
(3)
◽
pp. 1087
◽
1994 ◽
Vol 12
(4)
◽
pp. 2810
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2005 ◽
Vol 23
(4)
◽
pp. 911-916
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2005 ◽
Vol 193
(1-3)
◽
pp. 350-355
◽
1990 ◽
Vol 29
(Part 1, No. 10)
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pp. 2247-2250
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2003 ◽
Vol 216
(1-4)
◽
pp. 119-123
◽
1987 ◽
Vol 5
(4)
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pp. 1998-2002
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