Process-dependent thermal transport properties of silicon-dioxide films deposited using low-pressure chemical vapor deposition
1990 ◽
Vol 8
(6)
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pp. 1177
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1995 ◽
Vol 142
(2)
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pp. 676-682
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Keyword(s):
1992 ◽
Vol 47
(15-16)
◽
pp. 3925-3934
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Keyword(s):
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