e31 piezoelectric constant measurement of lead zirconate titanate thin films

Lead Zirconate Titanate Oxide (PbZrxTi1−xO3 or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. This paper is to present a simple and low-cost method to measure piezoelectric constant d33 of PZT thin films, which is a major challenge encountered in the actuator development. We use an impact hammer with a sharp tip to generate an impulsive force that acts on the PZT film. The impulsive force and the responding voltage are then measured to calculate the piezoelectric constant d33. The impulsive force has large enough amplitude so that a good signal-to-noise ratio can be maintained. Furthermore, the impulsive force has extremely short duration, so the discharge effect (i.e., the time constant effect) of the PZT circuit can be ignored. Preliminary testing on bulk PZT through this new method leads to two conclusions. Firstly, boundary conditions of the specimen are critical. In particular, the specimen must be securely fastened. Since the impulsive load only acts on a tiny area, loose boundary conditions can introduce spurious results from other piezoelectric constant d31. Secondly, size of the specimen is critical. Specimen of smaller size leads to more accurate measurements of the piezoelectric constant d33.

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Failure Mechanisms of Lead Zirconate Titanate Thin Films during Electromechanical Loading

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) ◽

10.1109/ifcs-isaf41089.2020.9234833 ◽

2020 ◽

Author(s):

Kathleen Coleman ◽

Julian Walker ◽

Wanlin Zhu ◽

Song Won Ko ◽

Peter Mardilovich ◽

...

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Failure Mechanisms ◽

Lead Zirconate ◽

Zirconate Titanate ◽

Electromechanical Loading

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Characteristics of Sputtered Lead Zirconate Titanate Thin Films with Different Layer Configurations and Large Thickness

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2020.3039230 ◽

2020 ◽

pp. 1-1

Author(s):

Kensuke Kanda ◽

Tsukasa Koyama ◽

Takeshi Yoshimura ◽

Shinichi Murakami ◽

Kazusuke Maenaka

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Large Thickness ◽

Zirconate Titanate

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Improvement of Ferroelectric Properties of Lead Zirconate Titanate Thin Films by Ion-substitution using Rare-earth Cations

MRS Proceedings ◽

10.1557/proc-830-d3.3 ◽

2004 ◽

Vol 830 ◽

Author(s):

Hiroshi Nakaki ◽

Hiroshi Uchida ◽

Shoji Okamoto ◽

Shintaro Yokoyama ◽

Hiroshi Funakubo ◽

...

Keyword(s):

Thin Films ◽

Rare Earth ◽

Lead Zirconate Titanate ◽

Ferroelectric Property ◽

Ferroelectric Properties ◽

Lead Zirconate ◽

Crystal Anisotropy ◽

Pzt Film ◽

Zirconate Titanate ◽

Ion Substitution

ABSTRACTRare-earth-substituted tetragonal lead zirconate titanate thin films were synthesized for improving the ferroelectric property of conventional lead zirconate titanate. Thin films of Pb1.00REx (Zr0.40Ti0.60)1-(3x /4)O3 (x = 0.02, RE = Y, Dy, Er and Yb) were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by a chemical solution deposition (CSD). B-site substitution using rare-earth cations described above enhanced the crystal anisotropy, i.e., ratio of PZT lattice parameters c/a. Remanent polarization (Pr) of PZT film was enhanced by Y3+-, Dy3+- and Er3+-substitution from 20 μC/cm2 up to 26, 25 and 26 μC/cm2 respectively, while ion substitution using Yb3+ degraded the Pr value down to 16 μC/cm2. These films had similar coercive fields (Ec) of around 100 kV/cm. Improving the ferroelectric property of PZT film by rare-earth-substitution would be ascribed to the enhancement of the crystal anisotropy. We concluded that ion substitution using some rare-earth cations, such as Y3+, Dy3+ or Er3+, is one of promising technique for improving the ferroelectric property of PZT film.

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