Properties and structures of diamond-like carbon film deposited using He, Ne, Ar/methane mixture by plasma enhanced chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.373507 ◽

2000 ◽

Vol 87 (11) ◽

pp. 8122-8131 ◽

Author(s):

Z. Sun ◽

C. H. Lin ◽

Y. L. Lee ◽

J. R. Shi ◽

B. K. Tay ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film ◽

Methane Mixture

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Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology ◽

10.6111/jkcgct.2012.22.4.190 ◽

2012 ◽

Vol 22 (4) ◽

pp. 190-193 ◽

Author(s):

Tae-Gyu Kim ◽

Yeong-Ho Shin ◽

Hyun Cho ◽

Jin-Kon Kim

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Diamond Like Carbon Film ◽

Frequency Plasma

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Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.06gn01 ◽

2017 ◽

Vol 56 (6S1) ◽

pp. 06GN01 ◽

Author(s):

Wenlei Zhang ◽

Akio Uesugi ◽

Yoshikazu Hirai ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Chemical Vapor Deposition ◽

Tensile Test ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

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Effects of silicon on microstructure and corrosion resistance of diamond-like-carbon film prepared on 2024 aluminum alloy by plasma-enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2020.108144 ◽

2020 ◽

Vol 110 ◽

pp. 108144 ◽

Author(s):

Hongyun Deng ◽

Dongxu Chen ◽

Yanan Wang ◽

Yanwen Zhou ◽

Peng Gao

Keyword(s):

Corrosion Resistance ◽

Aluminum Alloy ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

2024 Aluminum Alloy ◽

Diamond Like Carbon Film

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Deposition of hydrogen‐free diamond‐like carbon film by plasma enhanced chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.116648 ◽

1996 ◽

Vol 68 (25) ◽

pp. 3594-3595 ◽

Author(s):

Kyu Chang Park ◽

Jong Hyun Moon ◽

Jin Jang ◽

Myung Hwan Oh

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film

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Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.8003 ◽

2007 ◽

Vol 46 (12) ◽

pp. 8003-8004 ◽

Author(s):

Jun-ya Igaki ◽

Akihiko Saikubo ◽

Reo Kometani ◽

Kazuhiro Kanda ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film ◽

Elementary Analysis

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Structure and Electrochemical Properties of Nitrogen Doped Diamond-like Carbon Film Synthesized by Low Temperature Neutral Beam Enhanced Chemical Vapor Deposition

International Journal of Electrochemical Science ◽

10.20964/2018.02.11 ◽

2018 ◽

pp. 1803-1812 ◽

Author(s):

Qiuhe Wang ◽

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Electrochemical Properties ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Neutral Beam ◽

Diamond Like Carbon ◽

Nitrogen Doped ◽

Diamond Like Carbon Film

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Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.7464 ◽

2008 ◽

Vol 47 (9) ◽

pp. 7464-7466 ◽

Author(s):

Kazuhiro Kanda ◽

Jun-ya Igaki ◽

Akihiko Saikubo ◽

Reo Kometani ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film ◽

Material Characteristics

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Conductive Diamond-like Carbon Film Deposition by Low Temperature Neutral Beam Enhanced Chemical Vapor Deposition for Bio-LSIs

10.7567/ssdm.2014.ps-11-7 ◽

2014 ◽

Author(s):

X.J. Chang ◽

Y. Kikuchi ◽

T. Kubota ◽

K.Y. Inoue ◽

T. Matsue ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Film Deposition ◽

Neutral Beam ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film

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Development of a polygonal barrel-plasma enhanced chemical vapor deposition method for preparing powdered materials with a diamond-like carbon film

Chemical Engineering Journal ◽

10.1016/j.cej.2012.08.051 ◽

2012 ◽

Vol 209 ◽

pp. 616-622 ◽

Author(s):

Yuji Honda ◽

Satoshi Akamaru ◽

Mitsuhiro Inoue ◽

Takayuki Abe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

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Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.2817 ◽

1997 ◽

Vol 36 (Part 1, No. 5A) ◽

pp. 2817-2821 ◽

Author(s):

Hiroshi Inaba ◽

Yuuichi Kokaku ◽

Masatomo Terakado ◽

Hiroyuki Kataoka

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma

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