Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

2008 ◽  
Vol 47 (9) ◽  
pp. 7464-7466 ◽  
Author(s):  
Kazuhiro Kanda ◽  
Jun-ya Igaki ◽  
Akihiko Saikubo ◽  
Reo Kometani ◽  
Tsuneo Suzuki ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Material Characteristics

Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

2007 ◽  
Vol 46 (12) ◽  
pp. 8003-8004 ◽  
Author(s):  
Jun-ya Igaki ◽  
Akihiko Saikubo ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Tsuneo Suzuki ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Carbon Film ◽  
Chemical Vapor ◽  
Diamond Like Carbon ◽  
Diamond Like Carbon Film ◽  
Elementary Analysis

Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition

2012 ◽  
Vol 51 (6S) ◽  
pp. 06FD07 ◽  
Author(s):  
Akihiro Fujimoto ◽  
Makoto Okada ◽  
Yuji Kang ◽  
Masahito Niibe ◽  
Shinji Matsui ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Thermal Durability
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