Erratum: “The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor” [Phys. Plasmas 19, 093501 (2012)]
2014 ◽
Vol 32
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pp. 1460320
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High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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2010 ◽
Vol 14
(1-2)
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pp. 119-127
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Keyword(s):
2018 ◽
Vol 47
(9)
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pp. 4964-4969
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