Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

2013 ◽  
Vol 113 (12) ◽  
pp. 124305 ◽  
Author(s):  
Osman El-Atwani ◽  
Sean Gonderman ◽  
Alexander DeMasi ◽  
Anastassiya Suslova ◽  
Justin Fowler ◽  
...  
2012 ◽  
Vol 101 (26) ◽  
pp. 263104 ◽  
Author(s):  
Osman El-Atwani ◽  
Anastassiya Suslova ◽  
Alexander DeMasi ◽  
Sean Gonderman ◽  
Justin Fowler ◽  
...  

2015 ◽  
Vol 56 (2) ◽  
pp. 294-304 ◽  
Author(s):  
Guozhen Cao ◽  
Miaomiao Zhang ◽  
Jianshun Miao ◽  
Wenjian Li ◽  
Jufang Wang ◽  
...  

2000 ◽  
Vol 650 ◽  
Author(s):  
P. Patsalas ◽  
S. Logothetidis

ABSTRACTWe present the crystallization effects occurring in sputtered amorphous Carbon (a-C) thin films deposited on Si induced by post-growth low energy (0.5-1.5 keV) Ar+ ion beam irradiation (IBI). The a-C films after IBI have the form of an amorphous matrix with embedded crystalline regions. X-ray diffraction and Electron Microscopy measurements identified the crystalline phases of carbon and SiC. We study in detail the effects of ion energy and fluence on the crystallization process. It was found that low fluence (∼2×1016 ions/cm2) of ions with an optimum ion energy (∼1.5 keV) promoted the diamond formation. X-Ray Reflectivity (XRR) and Spectroscopic Ellipsometry were used to study the amorphous matrix. XRR discriminated the IBI induced surface and bulk effects through the density and the a-C surface roughness, showing surface smoothing to be more prominent for low energy IBI.


2020 ◽  
Vol 280 (3) ◽  
pp. 183-193
Author(s):  
R. DELL'ANNA ◽  
E. IACOB ◽  
M. TRIPATHI ◽  
A. DALTON ◽  
R. BÖTTGER ◽  
...  

2004 ◽  
Vol 228 (1-4) ◽  
pp. 151-157 ◽  
Author(s):  
P. Goudeau ◽  
J.L. Bechade ◽  
B. Boubeker ◽  
P.-O. Renault ◽  
A. Serrari ◽  
...  

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