Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy

2015 ◽  
Vol 118 (13) ◽  
pp. 135706 ◽  
Author(s):  
Won Ja Min ◽  
Kyungsu Park ◽  
Kyu-Sang Yu ◽  
Sungjung Joo ◽  
Yong-Sung Kim ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

scholarly journals Quantitative Analysis of Calcium Phosphate Nanocluster Growth Using Time-of-Flight Medium-Energy-Ion-Scattering Spectroscopy

2018 ◽  
Vol 4 (9) ◽  
pp. 1253-1260 ◽  
Author(s):  
Jimin Park ◽  
Ki Dong Yang ◽  
Na-Young Kim ◽  
Kang-Won Jung ◽  
Viet-Duc Le ◽  
...  
Keyword(s):  
Quantitative Analysis ◽  
Calcium Phosphate ◽  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Traceable thickness measurement of ultra-thin HfO2 films by medium-energy ion scattering spectroscopy

Metrologia ◽  
2020 ◽  
Vol 57 (2) ◽  
pp. 025001 ◽  
Author(s):  
Kyung Joong Kim ◽  
Tae Gun Kim ◽  
Ji-Hwan Kwon ◽  
Hyun Ruh ◽  
Kyungsu Park ◽  
...  
Keyword(s):  
Thickness Measurement ◽  
Medium Energy ◽  
Ion Scattering ◽  
Ion Scattering Spectroscopy ◽  
Medium Energy Ion Scattering

Determination of Dimension and Conformal Arsenic Doping Profile of a Fin Field Effect Transistors by Time-of-Flight Medium Energy Ion Scattering

2019 ◽  
Vol 91 (14) ◽  
pp. 9315-9322 ◽  
Author(s):  
Won Ja Min ◽  
Jwasoon Kim ◽  
Kyungsu Park ◽  
Gabriel Marmitt ◽  
Jonathan England ◽  
...  
Keyword(s):  
Field Effect ◽  
Field Effect Transistors ◽  
Time Of Flight ◽  
Doping Profile ◽  
Medium Energy ◽  
Ion Scattering ◽  
Arsenic Doping ◽  
Medium Energy Ion Scattering

Medium-Energy Ion Scattering Analysis with 50 keV He+by the Time-of-Flight Technique

1992 ◽  
Vol 31 (Part 1, No. 12A) ◽  
pp. 4095-4096
Author(s):  
Ichiro Konomi ◽  
Akira Kawano ◽  
Tatsumi Hioki
Keyword(s):  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Medium Energy Ion Scattering

scholarly journals New beam line for time-of-flight medium energy ion scattering with large area position sensitive detector

2012 ◽  
Vol 83 (9) ◽  
pp. 095107 ◽  
Author(s):  
M. K. Linnarsson ◽  
A. Hallén ◽  
J. Åström ◽  
D. Primetzhofer ◽  
S. Legendre ◽  
...  
Keyword(s):  
Time Of Flight ◽  
Beam Line ◽  
Position Sensitive Detector ◽  
Sensitive Detector ◽  
Medium Energy ◽  
Ion Scattering ◽  
Large Area ◽  
Position Sensitive ◽  
Medium Energy Ion Scattering

A versatile time-of-flight medium-energy ion scattering setup using multiple delay-line detectors

2020 ◽  
Vol 463 ◽  
pp. 16-20 ◽  
Author(s):  
Mauricio A. Sortica ◽  
Margareta K. Linnarsson ◽  
Dan Wessman ◽  
Svenja Lohmann ◽  
Daniel Primetzhofer
Keyword(s):  
Delay Line ◽  
Time Of Flight ◽  
Medium Energy ◽  
Ion Scattering ◽  
Multiple Delay ◽  
Medium Energy Ion Scattering
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