Thermal stability of an InAlN/GaN heterostructure grown on silicon by metal-organic chemical vapor deposition

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Gan Heterostructure ◽

Thermal Stability Of

Effect of a Ti capping layer on thermal stability of NiSi formed from Ni thin films deposited by metal–organic chemical vapor deposition using a Ni(iPr-DAD)2precursor

Japanese Journal of Applied Physics ◽

10.7567/jjap.54.025501 ◽

2015 ◽

Vol 54 (2) ◽

pp. 025501 ◽

Cited By ~ 1

Author(s):

Jingyu Park ◽

Heeyoung Jeon ◽

Hyunjung Kim ◽

Woochool Jang ◽

Chunho Kang ◽

...

Keyword(s):

Thin Films ◽

Thermal Stability ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Capping Layer ◽

Metal Organic ◽

Thermal Stability Of

Thermal Stability of HfO2Films Fabricated by Metal Organic Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.31 ◽

2008 ◽

Vol 47 (1) ◽

pp. 31-34 ◽

Cited By ~ 1

Author(s):

Yoshitaka Nagasato ◽

Yoshitaka Iwazaki ◽

Masahiko Hasumi ◽

Tomo Ueno ◽

Koichi Kuroiwa

Keyword(s):

Thermal Stability ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Thermal Stability Of

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Thermal stability and desorption of Group III nitrides prepared by metal organic chemical vapor deposition

10.1116/1.588793 ◽

1996 ◽

Vol 14 (6) ◽

pp. 3532 ◽

Cited By ~ 232

Author(s):

O. Ambacher

Keyword(s):

Thermal Stability ◽

Vapor Deposition ◽

Chemical Vapor ◽

Group Iii Nitrides ◽

Organic Chemical ◽

Group Iii ◽

Metal Organic ◽

Characterization of in situ SiNx thin film grown on AlN/GaN heterostructure by metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.4862664 ◽

2014 ◽

Vol 104 (3) ◽

pp. 032903 ◽

Cited By ~ 18

Author(s):

Xing Lu ◽

Jun Ma ◽

Huaxing Jiang ◽

Kei May Lau

Keyword(s):

Thin Film ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Gan Heterostructure ◽

NUMERICAL VISUALIZATION OF THERMAL FLOW STRUCTURE AND CONCENTRATION CONTOURS IN METAL ORGANIC CHEMICAL VAPOR DEPOSITION REACTORS

Journal of Flow Visualization and Image Processing ◽

10.1615/jflowvisimageproc.v7.i1.20 ◽

2000 ◽

Vol 7 (1) ◽

pp. 12

Author(s):

R. Y. Tzong ◽

C. Y. Soong

Keyword(s):

Flow Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Thermal Flow ◽

Numerical Visualization ◽

Metal Organic ◽

Laser‐Assisted Metal–Organic Chemical Vapor Deposition of Gallium Nitride

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.202170024 ◽

2021 ◽

Vol 15 (6) ◽

pp. 2170024

Author(s):

Yuxuan Zhang ◽

Zhaoying Chen ◽

Kaitian Zhang ◽

Zixuan Feng ◽

Hongping Zhao

Keyword(s):

Gallium Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Growth-Etch Metal–Organic Chemical Vapor Deposition Approach of WS2 Atomic Layers

ACS Nano ◽

10.1021/acsnano.0c05394 ◽

2020 ◽

Author(s):

Assael Cohen ◽

Avinash Patsha ◽

Pranab K. Mohapatra ◽

Miri Kazes ◽

Kamalakannan Ranganathan ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Vertical β-Ga2O3 field plate Schottky barrier diode from metal-organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/5.0047821 ◽

2021 ◽

Vol 118 (16) ◽

pp. 162109

Author(s):

Esmat Farzana ◽

Fikadu Alema ◽

Wan Ying Ho ◽

Akhil Mauze ◽

Takeki Itoh ◽

...

Keyword(s):

Schottky Barrier ◽

Vapor Deposition ◽

Chemical Vapor ◽

Schottky Barrier Diode ◽

Organic Chemical ◽

Field Plate ◽

Metal Organic ◽

The crystallographic quality and band-edge transition of as-deposited PALE AlN films via metal organic chemical vapor deposition

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-020-05070-3 ◽

2021 ◽

Author(s):

Mohd Nazri Abd Rahman ◽

Ahmad Shuhaimi ◽

Ooi Chong Seng ◽

Gary Tan ◽

Afiq Anuar ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Band Edge ◽

Organic Chemical ◽

Metal Organic ◽

Band Edge Transition

Metal Organic Chemical Vapor Deposition Growth of High Spectral Quality Site-Controlled InAs Quantum Dots UsingIn situPatterning

Applied Physics Express ◽

10.1143/apex.4.112001 ◽

2011 ◽

Vol 4 (11) ◽

pp. 112001 ◽

Cited By ~ 5

Author(s):

Stephane Faure ◽

Masao Nishioka ◽

Satomi Ishida ◽

Denis Guimard ◽

Yasuhiko Arakawa

Keyword(s):

Quantum Dots ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Spectral Quality ◽

Chemical Vapor Deposition Growth ◽

Inas Quantum Dots ◽

Metal Organic ◽