Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen

Applied Physics Letters ◽

10.1063/1.124010 ◽

1999 ◽

Vol 74 (19) ◽

pp. 2776-2778 ◽

Author(s):

Sang-Hun Seo ◽

Jung-In Hong ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Plasma Potential ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Argon Discharge

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Electron‐energy distribution function measurements in capacitively coupled rf discharges

Journal of Applied Physics ◽

10.1063/1.348935 ◽

1991 ◽

Vol 69 (1) ◽

pp. 121-128 ◽

Author(s):

G. Dilecce ◽

M. Capitelli ◽

S. De Benedictis

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/9/4/314 ◽

2000 ◽

Vol 9 (4) ◽

pp. 583-591 ◽

Author(s):

M Yan ◽

A Bogaerts ◽

W J Goedheer ◽

R Gijbels

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

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Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics ◽

10.1063/1.1990264 ◽

2005 ◽

Vol 98 (4) ◽

pp. 043301 ◽

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang ◽

Jeon-Geon Han

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Unbalanced Magnetron ◽

Argon Discharge

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Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/4/045009 ◽

2012 ◽

Vol 21 (4) ◽

pp. 045009 ◽

Author(s):

Xi-Ming Zhu ◽

Wen-Cong Chen ◽

Jiang Li ◽

Zhi-Wen Cheng ◽

Yi-Kang Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Spatial Evolution ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Evolution of the electron energy distribution function in a planar inductive argon discharge

Applied Physics Letters ◽

10.1063/1.125685 ◽

2000 ◽

Vol 76 (2) ◽

pp. 149-151 ◽

Author(s):

Sang-Hun Seo ◽

S. S. Kim ◽

Jung-In Hong ◽

C. S. Chang ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Argon Discharge

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Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aa6cf8 ◽

2017 ◽

Vol 50 (22) ◽

pp. 225201 ◽

Author(s):

Hyun-Joon Roh ◽

Nam-Kyun Kim ◽

Sangwon Ryu ◽

Yunchang Jang ◽

Gon-Ho Kim

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Very High Frequency ◽

Capacitively Coupled ◽

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Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source

Acta Physica Sinica ◽

10.7498/aps.57.6465 ◽

2008 ◽

Vol 57 (10) ◽

pp. 6465

Author(s):

Sun Kai ◽

Xin Yu ◽

Huang Xiao-Jiang ◽

Yuan Qiang-Hua ◽

Ning Zhao-Yuan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Journal of Applied Physics ◽

10.1063/1.2905213 ◽

2008 ◽

Vol 103 (8) ◽

pp. 083303 ◽

Author(s):

S. V. Singh

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Argon Discharge

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