Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

2012 ◽  
Vol 21 (4) ◽  
pp. 045009 ◽  
Author(s):  
Xi-Ming Zhu ◽  
Wen-Cong Chen ◽  
Jiang Li ◽  
Zhi-Wen Cheng ◽  
Yi-Kang Pu
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Low Pressure ◽  
Energy Distribution Function ◽  
Spatial Evolution ◽  
Electron Energy Distribution ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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