Characteristics of electron energy distribution function of capacitively coupled plasma excited by 60MHz RF source
2012 ◽
Vol 21
(4)
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pp. 045009
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2000 ◽
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pp. 583-591
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2017 ◽
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pp. 225201
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1977 ◽
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pp. 1027-1033
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2003 ◽
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