Nitrogen emission in reactive magnetron sputtering plasmas during the deposition of titanium nitride thin film

2017 ◽  
Author(s):  
Nafarizal Nayan ◽  
Soo Ren How ◽  
Jais Lias ◽  
Mohd Khairul Ahmad ◽  
Mohd Zainizan Sahdan ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Nitrogen Emission

scholarly journals RETRACTED ARTICLE: Nanocharacterization of Titanium Nitride Thin Films Obtained by Reactive Magnetron Sputtering

JOM ◽  
2015 ◽  
Vol 69 (8) ◽  
pp. 1455-1455
Author(s):  
Violeta Valentina Merie ◽  
Marius Sorin Pustan ◽  
Corina Bîrleanu ◽  
Gavril Negrea
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Retracted Article

Titanium nitride deposition on hardened high speed steel by reactive magnetron sputtering

1990 ◽  
Vol 190 (2) ◽  
pp. 265-277 ◽  
Author(s):  
M.Y. Al-Jaroudi ◽  
H.T.G. Hentzell ◽  
S.E. Hörnström ◽  
A. Bengtson
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
High Speed ◽  
High Speed Steel ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Deposition of titanium nitride on surface-hardened structural steel by reactive magnetron sputtering

1989 ◽  
Vol 182 (1-2) ◽  
pp. 153-166 ◽  
Author(s):  
M.Y. Al-Jaroudi ◽  
H.T.G. Hentzell ◽  
S.E. Hörnström ◽  
A. Bengtson
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
Structural Steel ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron
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