Indium–tin-oxide thin film prepared by microwave-enhanced d.c. reactive magnetron sputtering for telecommunication wavelengths

2002 ◽  
Vol 422 (1-2) ◽  
pp. 80-86 ◽  
Author(s):  
Li-Jian Meng ◽  
Eddie Crossan ◽  
Andrei Voronov ◽  
Frank Placido
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Reactive Magnetron

Properties of Nanosized Tin Oxide Thin Film Prepared by Reactive Magnetron Sputtering

2007 ◽  
Author(s):  
Xiao Di Liu ◽  
Dacheng Zhang
Keyword(s):  
Magnetron Sputtering ◽  
Quartz Glass ◽  
Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Oxide Thin Film ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Different Temperatures

Nanosized tin oxide thin films were fabricated on silicon and quartz glass substrates by direct current reactive magnetron sputtering method, and then were calcined at different temperatures ranging from 400°C to 900°C. The results analyzed by X ray photoemission spectra (XPS), scanning electron microscope (SEM), Spectroscopic ellipsometer, Powder X-ray diffraction (XRD), and HP4145B semiconductor parameter analyzer measurements show that the sample with quartz glass substrate and calcinated at 650°C possesses better properties and suitable to be used in our gas sensor.

Reactive Magnetron Sputtering of Indium Tin Oxide on Acrylics

2001 ◽  
Vol 206-213 ◽  
pp. 507-510
Author(s):  
Jow Lay Huang ◽  
Bao-Shun Yau ◽  
Su Shia Lin ◽  
Ding-Fwu Lii
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Relation between Plasma Parameters and Film Properties in DC Reactive Magnetron Sputtering of Indium-Tin-Oxide

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4922-4927 ◽  
Author(s):  
Yoshinobu Matsuda ◽  
Yasunari Yamori ◽  
Madoka Muta ◽  
Shinichi Ohgushi ◽  
Hiroshi Fujiyama
Keyword(s):  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Plasma Parameters ◽  
Film Properties ◽  
Dc Reactive Magnetron Sputtering
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