Design and fabrication of a resonant-cavity electrode microwave discharge device and its performance in argon and xenon plasma

2019 ◽  
Vol 90 (10) ◽  
pp. 103502
Author(s):  
Zhongkai Zhang ◽  
Yu Liu ◽  
Jinxiang Cao ◽  
Pengcheng Yu ◽  
Xiao Zhang ◽  
...  
Keyword(s):  
Microwave Discharge ◽  
Resonant Cavity ◽  
Discharge Device

Microwave discharge plasma production with resonant cavity for EUV mask inspection tool

2015 ◽  
Vol 54 (12) ◽  
pp. 126701
Author(s):  
Saya Tashima ◽  
Masami Ohnishi ◽  
Waheed Hugrass ◽  
Keita Sugimoto ◽  
Masatugu Sakaguchi ◽  
...  
Keyword(s):  
Discharge Plasma ◽  
Microwave Discharge ◽  
Resonant Cavity ◽  
Plasma Production ◽  
Mask Inspection

Plasma Generation by Resonant-Cavity Microwave Discharge and Its Applications for Material Processing

1993 ◽  
Vol 32 (Part 1, No. 4) ◽  
pp. 1822-1828 ◽  
Author(s):  
Hirokazu Tahara ◽  
Ken-ichiro Minami ◽  
Toshiaki Yasui ◽  
Ken-ichi Onoe ◽  
Yasuji Tsubakishita ◽  
...  
Keyword(s):  
Material Processing ◽  
Microwave Discharge ◽  
Resonant Cavity ◽  
Plasma Generation

Development of a Slot-Excited Planar Microwave Discharge Device for Uniform Plasma Processing

2004 ◽  
Vol 32 (1) ◽  
pp. 101-107 ◽  
Author(s):  
Y. Yasaka ◽  
N. Ishii ◽  
T. Yamamoto ◽  
M. Ando ◽  
M. Takahashi
Keyword(s):  
Microwave Discharge ◽  
Plasma Processing ◽  
Discharge Device ◽  
Uniform Plasma

Techniques for assessing the performance of circuit materials at microwave and millimetre-wave frequencies

2003 ◽  
Vol 783 ◽  
Author(s):  
Charles E Free
Keyword(s):  
Loss Tangent ◽  
Good Accuracy ◽  
Low Cost ◽  
Resonant Cavity ◽  
New Technique ◽  
Millimetre Wave ◽  
A New Technique

This paper discusses the techniques that are available for characterising circuit materials at microwave and millimetre wave frequencies. In particular, the paper focuses on a new technique for measuring the loss tangent of substrates at mm-wave frequencies using a circular resonant cavity. The benefits of the new technique are that it is simple, low cost, capable of good accuracy and has the potential to work at high mm-wave frequencies.

METHODS FOR OBTAINING MULTIFREQUENCY LASING IN RESONANT CAVITY OF THE THZ LASER

2016 ◽  
Vol 75 (4) ◽  
pp. 355-361
Author(s):  
V. P. Radionov ◽  
P. K. Nesterov ◽  
V. K. Kiseliov
Keyword(s):  
Resonant Cavity

Development of a Miniature Microwave Discharge Neutralizer for Miniature Ion Engines

2014 ◽  
Vol 62 (4) ◽  
pp. 123-128 ◽  
Author(s):  
Naoji YAMAMOTO ◽  
Yoshiaki HIRAOKA ◽  
Hideki NAKASHIMA
Keyword(s):  
Microwave Discharge
Sign in / Sign up

Export Citation Format

Share Document