Development of a slot-excited planar microwave discharge device for uniform plasma processing
2004 ◽
Vol 32
(1)
◽
pp. 101-107
◽
1996 ◽
Vol 5
(2)
◽
pp. 299-304
◽
1999 ◽
Vol 38
(Part 1, No. 7B)
◽
pp. 4309-4312
◽
1989 ◽
Vol 47
◽
pp. 552-553
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2019 ◽
Vol 23
(1)
◽
pp. 25-36
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2016 ◽
Vol 20
(1)
◽
pp. 59-83
2014 ◽
Vol 62
(4)
◽
pp. 123-128
◽
Keyword(s):