Microwave discharge plasma production with resonant cavity for EUV mask inspection tool

2015 ◽  
Vol 54 (12) ◽  
pp. 126701
Author(s):  
Saya Tashima ◽  
Masami Ohnishi ◽  
Waheed Hugrass ◽  
Keita Sugimoto ◽  
Masatugu Sakaguchi ◽  
...  
Keyword(s):  
Discharge Plasma ◽  
Microwave Discharge ◽  
Resonant Cavity ◽  
Plasma Production ◽  
Mask Inspection

Design and fabrication of a resonant-cavity electrode microwave discharge device and its performance in argon and xenon plasma

2019 ◽  
Vol 90 (10) ◽  
pp. 103502
Author(s):  
Zhongkai Zhang ◽  
Yu Liu ◽  
Jinxiang Cao ◽  
Pengcheng Yu ◽  
Xiao Zhang ◽  
...  
Keyword(s):  
Microwave Discharge ◽  
Resonant Cavity ◽  
Discharge Device

Moving Striation in Microwave Discharge Plasma

1961 ◽  
Vol 16 (6) ◽  
pp. 1255-1255 ◽  
Author(s):  
Mikio Takeyama ◽  
Tanehiro Nakau ◽  
Sōzaburo Yamasaki ◽  
Takeshi Isa
Keyword(s):  
Discharge Plasma ◽  
Microwave Discharge

The effect of shear on turbulent diffusion in a microwave discharge plasma in a toroidal stellarator

1977 ◽  
Vol 17 (4) ◽  
pp. 651-658 ◽  
Author(s):  
V.S. Vojtsenya ◽  
A. Yu. Voloshko ◽  
V.M. Zalkind ◽  
S.I. Solodovchenko ◽  
V.P. Tarasenko ◽  
...  
Keyword(s):  
Turbulent Diffusion ◽  
Discharge Plasma ◽  
Microwave Discharge

The Production of H2O2in the Microwave Discharge Plasma of CH4/O2

2001 ◽  
Vol 105 (44) ◽  
pp. 10089-10092 ◽  
Author(s):  
Toshihiro Fujii ◽  
Shinichi Iijima ◽  
Keiichiro Iwase ◽  
Sundaram Arulmozhiraja
Keyword(s):  
Discharge Plasma ◽  
Microwave Discharge
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