Performance characteristics of plasmajets and ion sources using resonant-cavity microwave discharge

1990 ◽  
Author(s):  
H. TAHARA ◽  
K. ONOE ◽  
T. YOSHIKAWA
Keyword(s):  
Microwave Discharge ◽  
Resonant Cavity ◽  
Ion Sources ◽  
Performance Characteristics

Design and fabrication of a resonant-cavity electrode microwave discharge device and its performance in argon and xenon plasma

2019 ◽  
Vol 90 (10) ◽  
pp. 103502
Author(s):  
Zhongkai Zhang ◽  
Yu Liu ◽  
Jinxiang Cao ◽  
Pengcheng Yu ◽  
Xiao Zhang ◽  
...  
Keyword(s):  
Microwave Discharge ◽  
Resonant Cavity ◽  
Discharge Device

Microwave discharge plasma production with resonant cavity for EUV mask inspection tool

2015 ◽  
Vol 54 (12) ◽  
pp. 126701
Author(s):  
Saya Tashima ◽  
Masami Ohnishi ◽  
Waheed Hugrass ◽  
Keita Sugimoto ◽  
Masatugu Sakaguchi ◽  
...  
Keyword(s):  
Discharge Plasma ◽  
Microwave Discharge ◽  
Resonant Cavity ◽  
Plasma Production ◽  
Mask Inspection

Diffusion processes in microwave discharge ion source and consequences on the upgrade of existing ion sources

2019 ◽  
Vol 90 (2) ◽  
pp. 023301 ◽  
Author(s):  
G. Castro ◽  
D. Mascali ◽  
R. Miracoli ◽  
L. Celona ◽  
S. Gammino
Keyword(s):  
Microwave Discharge ◽  
Diffusion Processes ◽  
Ion Source ◽  
Ion Sources

Plasma Generation by Resonant-Cavity Microwave Discharge and Its Applications for Material Processing

1993 ◽  
Vol 32 (Part 1, No. 4) ◽  
pp. 1822-1828 ◽  
Author(s):  
Hirokazu Tahara ◽  
Ken-ichiro Minami ◽  
Toshiaki Yasui ◽  
Ken-ichi Onoe ◽  
Yasuji Tsubakishita ◽  
...  
Keyword(s):  
Material Processing ◽  
Microwave Discharge ◽  
Resonant Cavity ◽  
Plasma Generation
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